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单晶锗各向异性力学性能实验 被引量:1

Experiment of Anisotropic Mechanical Properties of Single Crystal Germanium
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摘要 单晶锗作为一种重要的半导体材料,在我国机电系统发展以及电路系统的优化升级中扮演着关键性的角色。为了充分发挥单晶锗在推动半导体产业发展,满足社会经济发展需求方面的作用,需要相关科技工作者对单晶锗(100)(110)(111)的各向异性力学性能进行全面的试验探究,对其实用性与加工性进行分析,促进单晶锗在实践中的有序使用。基于此,以纳米压痕实验为主要试验手段,对单晶锗(100)(110)(111)在试验过程中所表现出来的硬度及弹性模量等进行记录,以期为其力学性在实践中的应用提供理论参考。 Single crystal germanium, as an important semiconductor material, plays a key role in the optimization andupgrading of China's electromechanical system development as well as the circuit of the system. In order to give fullplay to the role of single crystal germanium in promoting the development of semiconductor industry and meeting theneeds of social and economic development, the related scientific and technical workers need to carry out a compre-hensive experimental study on the anisotropic mechanical properties of single crystal germanium(100),(110),(111),analyzed the practicality and the processing to promote the orderly use of single crystal germanium in practice. Basedon this, taking nano indentation experiment as the experimental means, the hardness and elastic modulus of singlecrystal germanium(100),(110),(111) shown in the test was recorded, to provide a theoretical reference for the appli-cation of its mechanical properties in practice.
作者 周航
机构地区 长春理工大学
出处 《河南科技》 2016年第21期127-129,共3页 Henan Science and Technology
关键词 单晶锗 各向异性 纳米压痕实验 力学性能 single crystal germanium anisotropy nano indentation experiment mechanical property
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