摘要
Al2O3薄膜因其光学性能优良、机械强度与硬度高、透明性与绝缘性好、耐磨、抗蚀及化学惰性等特点而引起人们的极大兴趣,已经广泛地应用于光学、机械及微电子等领域。简述了Al2O3薄膜的应用及制备方法。
Aluminum oxide thin films are widely used in mechanical, optical and microelectronic applications because of their excellent properties, in term of chemical inertness, mechanical strength, hardness, transparency, high abrasive and corrosion resistance, as well as insulating and optical properties. The application and preparation of Al2O3 thin films are introduced.\;
出处
《真空与低温》
2002年第4期236-240,共5页
Vacuum and Cryogenics
