摘要
以Fe纳米颗粒为催化剂,采用催化氮化的方法制备氮化硅。结果表明:加入2%的Fe纳米颗粒,1 350℃保温2h催化氮化后,试样中的残余硅含量小于5%,而相同条件下无催化剂的试样中,单质硅的残余率高达50%。催化氮化制得的Si3N4试样中存在大量的晶须状Si3N4,其直径在40~200nm,长度可达几微米至十几微米。Si3N4晶须的生长机理主要为气相--液相--固相机理与固相--液相--气相--固相机理。
Silicon nitride with Fe nanoparticles as a catalyst was prepared by a catalytic nitridation method.The results show that for the sample with 2% of Fe nanoparticles as catalyst,the residual silicon in the final sample is<5%at 1 350℃for 2h.However,for the sample without catalysts,the residual silicon in final sample is 50%.The Si3N4 whiskers with 40--200 nm in diameter and tens microns in length appear in the final products.The formation process of the Si3N4 whiskers could be based on a vapor-liquid-solid growth mechanism and a solid-liquid-gas-solid growth mechanism.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2014年第12期1585-1590,共6页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金面上项目(51272188)
湖北省自然科学基金重点项目(2013CFA086)
湖北省科技支撑计划对外科技合作项目(2013BHE002)资助
关键词
氮化硅
铁纳米颗粒
晶须
催化氮化
silicon nitride
iron nanoparticles
whiskers
catalytic nitridation
