摘要
采用飞秒激光对氟化钙晶体表面进行加工。通过调控激光参数,采用静止聚焦和动态扫描两种方式在晶体表面加工出一系列微结构(烧蚀孔和烧蚀线)。分别对两种加工方式烧蚀后的氟化钙晶体表面微结构进行系统研究,包括参数依赖关系、材料表面烧蚀阈值等。计算结果表明:在静止聚焦情况下,累积因子为0.0033;在动态扫描情况下,当扫描方向与激光偏振方向垂直或平行时,累积因子分别为0.0043和0.0052。飞秒激光加工过程中的脉冲累积效应能够对晶体的烧蚀产生重要影响。
Femtosecond laser is used to ablate a CaF2 crystal surface. By varying the laser parameters, we produce the microstructures(including ablation holes and lines) using stationary focusing ablation and dynamic scanning. The laser-induced microstructures on CaF2 crystal surface under both processing modes are investigated to obtain the parameter dependence and ablation threshold. The calculation results reveal that the incubation factor is 0. 0033 in the stationary focusing case;whereas, in the case of dynamic scanning, the incubation factor is 0. 0043 or 0. 0052 when the scanning direction is perpendicular or parallel to the laser polarization, respectively. The results reveal that the incubation effect plays an important role in the process of femtosecond laser ablation on crystal surface.
作者
郭太勇
张立木
任莹莹
蔡阳健
Carolina Romero
Javier R.Vázquez de Aldana
Guo Taiyong;Zhang Limu;Ren Yingying;Cai Yangjian;Carolina Romero;Javier R.Vázquez de Aldana(Center of Light Manipulations and Applications,Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan,Shandong 250014,China;Laser Microprocessing Group,Department of Applied Physics,University of Salamanca,Salamanca 37008,Spain)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2019年第1期271-277,共7页
Acta Optica Sinica
基金
国家自然科学基金(11404194
11874243)
关键词
物理光学
飞秒激光烧蚀
微结构
累积效应
氟化钙晶体
physical optics
femtosecond laser ablation
microstructure
incubation effect
CaF2 crystal
