摘要
在气浮轴承研究的基础上,将相应的技术应用到某硅片台上。为了评判气浮技术在该硅片台的应用效果,对该平台进行了有限分析和实验研究。研究结果表明:气浮技术在平台的运用是成功的,其产生的前六阶模态,无论在频率和振型上,有限元分析结果和实验研究都非常符合,且在整个实验中,最大的频率误差才3.4%。
On the basis of research on air-thrust bearings,some results have been applied on a certain wafer stage.In order to assess the applying effect of the air-thrust bearings,the finite element analysis and experimental research on the wafer stage have been carried out.The research results show that the application of the air-thrust bearing applied to the wafer stage is successful and the results of the finite element analysis and experimental research on the former 6-class modes are corresponding,and the maximum error in frequency is not more than 3.4%.
基金
宁波市自然科学基金项目(No.2009A610101)
关键词
气浮系统
精密定位台
有限元分析
实验研究
Air-thrust Bearing System
Precise Position Stage
Finite Element Analysis
Experimental Research
