摘要
介绍一种高精度的光刻机对准微动硅片台的机械结构,并对其功能和工作原理进行详细叙述。
The micro drive mechanical system of a wafer stage used for a super precise lithographic machine is introduced.Its functions and mechanism are described in details.
出处
《电子工业专用设备》
2009年第1期36-38,共3页
Equipment for Electronic Products Manufacturing
关键词
高精度
微动
硅片台
功能
工作原理
Super precise
Micro drive
Wafer stage
Functions
Mechanism
