摘要
以利于实际生产优化蚀刻微通道板为出发点,探究了酸液浓度、搅拌速度、反应温度对微通道板通孔率的影响,采取Box-Behnken设计响应曲面法探究了单因素及双因素间的相互作用对通孔率的影响。对各拟合模型方差和决定系数分析可知,二次多项式模型拟合显著性最好,说明试验设计所得的回归方程具有可行性。单因素中酸液浓度、搅拌速度、反应温度均对通孔率有显著影响,各因素对通孔率影响大小为:反应温度>酸液浓度>搅拌速度;双因素中酸液浓度与搅拌速度的交互作用显著且对通孔率影响最大。模型结合实际分析得出微通道板的最优蚀刻条件为:酸液浓度0.43 mol/L,搅拌转速648 r/min,反应温度36.6℃,在此条件下,微通道板的通孔率为100%。优选的微通道板蚀刻工艺可以有效提升通孔率,工艺稳定可行,为微通道蚀刻技术在实际应用中的推广和发展提供有力支持。
Taking the starting point of optimizing the etching of microchannel plates for practical production,the effects of acid concentration,stirring speed,and reaction temperature on the throughhole rate of microchannel plates were investigated,and the response surface method of Box-Behnken design was adopted to investigate the effects of single factor and two-factor interactions on the through-hole rate.The results showed that the analysis of the variance and coefficient of determination of each fitted model showed that the quadratic polynomial model fitted the best significance,indicating that the regression equation obtained from the experimental design was feasible.Among the single factors,the acid concentration,stirring speed and reaction temperature had a significant effect on the through-hole rate,and the influence of each factor on the through-hole rate was as follows:reaction temperature>acid concentration>stirring speed;among the two factors,the interaction between acid concentration and stirring speed was significant and had the greatest effect on the through-hole rate.The optimal etching conditions for the microchannel plate were as follows:acid concentration of 0.43 mol/L,stirring speed of 648 r/min,and reaction temperature of 36.6℃,under which the through-hole rate of the microchannel plate was 100%.The preferred microchannel plate etching process can effectively improve the through-hole rate,and the process is stable and feasible,which provides strong support for the promotion and development of microchannel etching technology in practical applications.
作者
王三昭
马西响
任宏宇
张兵强
王德印
张月
WANG Sanzhao;MA Xixiang;REN Hongyu;ZHANG Bingqiang;WANG Deyin;ZHANG Yue(CNBM Guangxin Technology Co.,Ltd.,Zaozhuang 277101,China)
出处
《玻璃》
2024年第11期1-6,19,共7页
Glass
