摘要
为实现高效制备微细工具电极,提出一种双向脉冲液膜电化学刻蚀技术,相较于单极性脉冲电源可明显提高加工效率,减小球头直径。实验研究了负脉冲电压、正脉冲电压和脉冲周期对氢气泡、电解产物的运动分布规律以及所制备工具电极形貌的影响。研究发现,负脉冲电压可明显消除扩散层的影响,使电流密度分布更加均匀,并且缩短加工时间;在电解液浓度0.5 mol/L、正电压3 V、负电压-2 V、脉冲周期50μs、占空比40%的条件下,可成功制备出直径约580 nm的球头电极。
A bidirectional pulsed liquid membrane electrochemical etching method was proposed to prepare tool electrodes efficiently,which can significantly improve the machining efficiency and reduce the diameter of spherical probes compared with unipolar pulse power supply.The effect of negative pulse voltage,positive pulse voltage and pulse period on the motion distribution of hydrogen bubbles and electrolytic products as well as the morphology of tool electrodes were investigated.It was found that the negative pulse voltage can significantly eliminate the influence of diffusion layers,make the current density distribution uniform and shorten the processing time.Under the conditions of electrolyte concentration of 0.5 mol/L,positive voltage of 3 V,negative voltage of-2 V,pulse period of 50μs and duty cycle of 40%,a spherical electrode with a diameter of approximately 580 nm can be successfully prepared.
作者
王丽
吴修娟
孔维静
曾永彬
WANG Li;WU Xiujuan;KONG Weijing;ZENG Yongbin(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;College of Mechanical Engineering,Nanjing Vocational University of Industry Technology,Nanjing 210023,China)
出处
《电加工与模具》
北大核心
2024年第5期31-37,共7页
Electromachining & Mould
基金
国家自然科学基金项目(52205473)
江苏省工业感知及智能制造装备工程研究中心项目(ZK21-05-03)。
关键词
双向脉冲
电化学刻蚀
微细电极
负脉冲电压
bipolar pulse
electrochemical etching
micro tool electrode
negative pulse voltage
