摘要
为了提高激光跟踪仪坐标测量精度,分析了跟踪仪的几何结构误差,研究了横竖轴平移误差、横竖轴倾斜误差、激光平移误差和激光倾斜误差的标定和修正方法。利用几何分析法建立了几何结构误差模型,基于投影图像测量仪和检棒、PSD搭建了几何误差参数的标定装置,实现对几何误差的快速自动高精度标定及补偿。最后,利用误差标定实验测量出的几何误差代入误差补偿模型,与标尺的长度进行比对分析。实验结果表明:经几何误差修正后的跟踪仪坐标测量误差从13μm/m减小到4μm/m以内,测量精度约提升了9μm/m,验证了几何误差标定和修正方法的正确性,该方法可以提高激光跟踪仪的坐标测量精度。
To enhance the coordinate measurement accuracy of laser trackers,we analyzed the geometric errors of the device and studied calibration and correction methods for transit offset error,transit tilt error,laser offset error,and laser tilt error.First,geometric error models were established using geometric analysis methods.A calibration device for geometric error parameters was constructed based on a telecentric measurement system,test rods and a PSD device.This setup allows for rapid,automatic high-precision calibration and compensation of geometric errors.Subsequently,the geometric errors measured by the calibration experiment were incorporated into the error compensation models,and the scale bar length measured by the laser tracker was compared with its standard length.Experimental results indicate that after geometric error correction,the coordinate measurement error of the laser tracker can be reduced from 13μm/m to less than 4μm/m,improving measurement accuracy by approximately 9μm/m.These findings confirm the validity of the geometric error calibration and correction methods,demonstrating that coordinate measurement accuracy of laser trackers can be significantly enhanced using these methods.
作者
王珊
张滋黎
董登峰
周维虎
纪荣祎
潘映伶
王国名
崔成君
WANG Shan;ZHANG Zili;DONG Dengfeng;ZHOU Weihu;JI Rongyi;PAN Yingling;WANG Guoming;CUI Chengjun(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2024年第11期1639-1652,共14页
Optics and Precision Engineering
基金
工业和信息化部高质量专项(No.TC220505T)。
