摘要
负载会影响转台回转轴的运动状态,进一步影响转台角位置误差的大小。通过分析负载工况下转台角位置误差傅里叶阶次的变化情况,提出一种基于谐波补偿的误差补偿方法。首先,分析负载对转台回转轴的影响,建立回转轴误差运动与角位置误差之间的数学模型,并进行数值仿真;其次,通过负载变化影响回转轴误差运动的大小,获取转台不同负载下的自校准曲线,采用傅里叶法分析对负载变化敏感的傅里叶阶次;最后,选取对负载变化敏感的傅里叶阶次拟合谐波补偿函数对转台角位置误差进行补偿。误差补偿后转台在不同负载工况下的角位置误差最大为±0.25″,与补偿后空载工况下角位置误差相差±0.03″,有效减小了负载对转台角位置误差的影响。
Load affects the motion state of the rotary axis of the rotary table,which further affects the magnitude of the angular position error of the rotary table.By analysing the variation of the Fourier order of the rotary table angular position error under the load condition,an error compensation method based on harmonic compensation is proposed.Firstly,the influence of load on the rotary axis of the rotary table is analysed,the mathematical model between the rotary axis error motion and the angular position error is established,and numerical simulation is carried out.Secondly,the magnitude of the rotary axis error motion is affected by the load change,the self-calibration curves under different loads of the rotary table are obtained,and the Fourier order sensitive to the load change is analysed by the Fourier method.Finally,the Fourier order sensitive to load changes is selected to fit the harmonic compensation function to compensate the rotary table angular position error.The maximum angular position error of the rotary table under different load conditions after the error compensation is±0.25″,which is±0.03″different from the angular position error under no-load conditions after the compensation,which effectively reduces the influence of load on the angular position error of the rotary table.
作者
肖美梁
薛梓
黄垚
朱维斌
林虎
杨禹
XIAO Meiliang;XUE Zi;HUANG Yao;ZHU Weibin;LIN Hu;YANG Yu(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)
出处
《计量学报》
CSCD
北大核心
2024年第6期827-833,共7页
Acta Metrologica Sinica
基金
国家自然科学基金(51935004)。
关键词
角度测量
转台
变负载
傅里叶分析
误差补偿
angular measurement
rotary table
variable load
Fourier analysis
error compensation
