摘要
针对全硅光电生物传感器的硅基单片集成应用需求,提出了基于多晶硅级联自发光器件的单片集成传感器,对其中作为关键部分的多晶硅光源进行了试制,采用标准0.35μm的CMOS工艺对该光源进行了流片验证,并设计了适配的全硅波导检测结构。结果表明,多晶硅光源发光特征峰为635 nm、700 nm和785 nm,该特征峰作为波导入射光源时,设计的全硅波导检测结构能够实现检测目的。
To obtain faster response time and higher stability for an all-silicon photovoltaic biosensor,we propose a monolithic integrated sensor based on a polycrystalline silicon cascade of self-luminous devices.The sensor integrates a silicon-based light source,a silicon-based optical waveguide,and a photodetector.The use of monolithic integration can theoretically improve the performance of the sensor by structurally minimizing the coupling loss of the different components of the sensor system.The sensor system can be compatible with standard Complementary Metal Oxide Semiconductor(CMOS)processes in order to have properties such as low cost,large-scale manufacturability,and a high degree of integration.This integrated system is different from conventional electrical sensing systems,and we have investigated optical waveguide detection sensing considering the high stability and sensitivity characteristic of optical sensing.Since optical detectors have been developed maturely,we focused on the light source and optical waveguide.To realize the monolithic integrated system,we designed a Cascade Silicon Self-Luminous Device(CSSLD)light source and studied its performance.The light source is the core component of the whole sensing system,and the performance of the sensor largely depends on the efficiency,costeffectiveness and integrability of this light-emitting element.Firstly,the feasibility of the device structure based on the avalanche breakdown operation mode is verified by modelling the light source with simulation software and simulation experiments of the electric field.Secondly,the CSSLD is tested by 0.35 um CMOS process for wafering,and its electroluminescence spectrum is extracted.Three characteristic peaks are found,which are located at 635 nm,700 nm,and 785 nm,respectively.Through analysis,these phenomena indicate that the photoemission is mainly due to the acceleration of electrons gaining energy under high electric field,which promotes theirs in-band jumps in the conduction band and thus enhances the radiative c
作者
唐宇
罗谦
刘斯扬
SNYMAN Lukas W
徐开凯
TANG Yu;LUO Qian;LIU Siyang;SNYMAN Lukas W;XU Kaikai(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China;National ASIC System Engineering Research Center,Southeast University,Wuxi 214000,China;Department of Electrical and Electronic Engineering,University of South Africa,Pretoria 0001,South Africa)
出处
《光子学报》
EI
CAS
CSCD
北大核心
2024年第5期180-188,共9页
Acta Photonica Sinica
基金
国家自然科学基金(No.62174018)
四川省科技厅重点研发项目(No.2023YFG0141)。
关键词
单片集成
硅基光源
氮化硅波导
生物传感器
折射率传感
Monolithic integrated
Silicon-based light source
Silicon nitride waveguide
Biosensor
Refractive index sensing
