摘要
随着技术发展,光学检测对检测范围有了更大的需求,利用光弹调制器取代传统的偏振调制器件,具有着光谱范围广、调制频率高等优势。根据在椭偏测量仪中所应用的光弹调制器结构,设计了一种基于FPGA的光弹调制器控制模块,主要包含驱动模块和反馈调节模块两部分,利用DDS技术和数字锁相技术实现了对光弹调制器的稳定驱动控制。经过测试验证该模块可以稳定产生60kHz及450V_(PP)以上的驱动信号,所设计的驱动模块可以满足光弹调制器的控制需求。
With the development of technology,the detection range of optical detection has a greater demand,the use of pho⁃toelastic modulator instead of the traditional polarization modulator,has a wide spectrum range,high frequency modulation advan⁃tages.According to the structure of the photoelastic modulator used in the ellipsometer,a control module of the photoelastic modula⁃tor based on FPGA is designed in this paper.It mainly consists of a driving module and a feedback regulating module.The stable driving control of the photoelastic modulator is realized by using DDS technology and digital phase-lock technology.The test verifies that the module can stably generate driving signals above 60kHz and 450V_(PP),and the designed driving module can meet the control requirements of photoelastic modulator.
作者
易进
张瑞
薛鹏
王志斌
YI Jin;ZHANG Rui;XUE Peng;WANG Zhibin(Institute of Instrument and Electronics,North University of China,Taiyuan 030051;Shanxi Optoelectronic Information and Instrument Engineering Technology Research Center,Taiyuan 030051;Frontier Interdisciplinary Research Institute,North University of China,Taiyuan 030051)
出处
《舰船电子工程》
2024年第2期184-187,199,共5页
Ship Electronic Engineering
基金
国家自然科学基金项目(编号:62105302)
山西省基础研究计划项目(编号:20210302124269)资助。
