摘要
采用等离子体增强化学气相沉积技术(PECVD)在316L不锈钢上制备类金刚石(DLC)涂层,系统地研究了所制备类金刚石涂层的表面形貌与结构、不同载荷下的摩擦磨损行为以及NaCl溶液(3.5 wt%)中不同腐蚀时间下的腐蚀行为。研究结果表明:制备的DLC涂层是由sp^(3)键和sp^(2)键杂化形成的非晶碳结构,其中sp^(2)-C含量大于sp^(3)-C,具有典型的类金刚石碳特征;DLC涂层结构致密,表面平滑,粗糙度仅为Ra=12.1 nm,能够与316L不锈钢基体结合紧密;DLC涂层的接触角为59.44°,说明涂层表现出一定的润湿性;摩擦磨损测试结果表明DLC涂层具有良好的润滑效果,摩擦系数能低至0.07~0.16,磨损率低至(3.85~6.71)×10^(-7) mm^(3)/(N·m);电化学测试得到DLC涂层自腐蚀电流密度为6.72×10^(-6 )A·cm^(-2),阻抗模值高达7.05×10~4Ω·cm^(-2)。这些表明PECVD技术制备的DLC涂层具有优异的摩擦学与耐腐蚀性能,能够对316L不锈钢基底材料形成较好的保护性能。
Diamond-like carbon(DLC) coating was prepared on 316L stainless steel by plasma enhanced chemical vapor deposition technology.The surface morphology and structure,friction and wear behavior under different loads and corrosion behavior of NaCl solution(3.5wt%) under different soaking time were studied.The results show that the prepared DLC coating is an amorphous carbon structure coating formed by hybridization of sp^(2) bond and sp^(3) bond,in which the content of sp^(2) bond is higher than sp^(3) bond,and its properties are similar to diamond-like carbon coating.The DLC coating has a dense structure and a smooth surface with a roughness of only Ra=12.1 nm,which can tightly bond with the 316L stainless steel substrate;The contact angle of DLC coating is 59.44°,indicating that the coating exhibits certain wettability.The friction and wear test results show that the DLC coating has good lubrication effect,with a friction coefficient as low as 0.07~0.16 and a wear rate as low as(33.85~6.71)×10^(-7)mm^(3)/N·m.Electrochemical testing showed that the self corrosion current density of DLC coating was 6.72×10^(-6 )A·cm^(-2),and the impedance modulus was as high as 7.05×10^(4 )Ω·cm^(-2).These indicate that the DLC coating prepared by PECVD technology has excellent tribological and corrosion resistance properties,which can form good protective properties for 316L stainless steel substrate materials.
作者
宋紫炆
肖乐银
肖锦
周思科
张彤彤
马利秋
彭金勇
周升国
SONG Ziwen;XIAO Leyin;XIAO Jin;ZHOU Sike;ZHANG Tongtong;MA Liqiu;PENG Jinyong;ZHOU SHenguo(School of Materials Science and Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,China;Chinese National Engineering Research Center for Special Materials,China Nonferrous Metals(Guilin)Geology And Mining Co.,Ltd.,Guilin 541004,China;School of Science,Jiangxi University of Science and Technology,Ganzhou,341000,China)
出处
《超硬材料工程》
CAS
2024年第1期1-8,共8页
Superhard Material Engineering
基金
江西省教育厅一般项目(GJJ2200827),国家自然科学基金(52065025)。
关键词
PECVD
类金刚石
摩擦磨损
电化学腐蚀
PECVD,diamond-like carbon,friction and wear
electrochemical corrosion
