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沉积偏压对2024铝合金表面类金刚石薄膜结构及性能的影响 被引量:4

Effects of deposition bias voltage on mircostructures and properties of diamond-like carbon films on a 2024 aluminum alloy
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摘要 利用等离子体增强化学气相沉积技术,在2024铝合金表面制备类金刚石(DLC)薄膜,以改善铝合金表面机械性能。利用拉曼光谱及红外光谱,对不同沉积偏压下制备DLC薄膜的成分及结构进行表征;利用摩擦磨损试验机、纳米压痕仪及台阶仪等,分别对不同沉积偏压下制备DLC薄膜的耐磨性、硬度、弹性模量及薄膜厚度进行检测,并探讨了沉积偏压对薄膜结构及性能的影响规律及影响机制。研究表明:随着沉积偏压增大(1800~2600 V),薄膜厚度、硬度及弹性模量均先增大后减小。当沉积偏压为2400 V时,DLC薄膜厚度最厚,硬度及弹性模量最高。当沉积偏压为2600 V时,薄膜的H/(Ef)最高,并且摩擦系数从基体的0.492降低至0.0958。 The plasma-enhanced chemical vapor deposition was used to prepare diamond-like carbon(DLC)films on the surface of a 2024 aluminum alloy to improve the wear resistance of the alloy.The compositions and microstructures of the DLC films prepared under different deposition bias voltages were characterized by Raman spectroscopy and infrared spectroscopy.The wear resistance,hardness,elastic modulus,and film thickness of the DLC films prepared under different deposition bias voltages were investigated by friction and abrasion tester,nano indenter,and step meter,respectively.The influence of the deposition bias voltages on the microstructures and properties of the DLC films are investigated,and the mechanism is discussed.The results show that with the increase of the deposition bias voltage(1800~2600 V),the thickness,hardness,and elastic modulus of the films firstly increase,and then decrease.At the deposition bias voltage of 2400 V,the thickness,hardness,and elastic modulus of the DLC films reached their highest values.At the deposition bias voltage of 2600 V,the H/(Ef)value of the film is the highest,and the friction coefficient of the matrix reduced from 0.492 to 0.0958.
作者 邓洪运 陈东旭 王亚男 周艳文 DENG Hongyun;CHEN Dongxu;WANG Yanan;ZHOU Yanwen(School of Materials and Metallurgy,University of Science and Technology Liaoning,Anshan 114051,China)
出处 《辽宁科技大学学报》 CAS 2020年第1期10-15,共6页 Journal of University of Science and Technology Liaoning
基金 辽宁省自然科学基金(20180510001) 辽宁科技大学校人才计划(2018RC03) 辽宁省教育厅项目(SKLMEA-USTL-201709、SKLMEA-USTLN(201909)).
关键词 2024铝合金 类金刚石薄膜 耐磨性能 等离子体增强化学气相沉积 拉曼光谱 2024 aluminum alloy diamond-like carbon film wear resistance plasma enhanced chemical vapor deposition Raman spectroscopy
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