摘要
随着先进制造领域对高速钢材料切削性能和加工性能的要求越来越高,迫切需要利用氮化物薄膜来提高基体材料的硬度和耐磨性等综合性能,延长高速钢材料的使用寿命。通过TiCrN薄膜提升高速钢材料的使役性能,研究脉冲偏压占空比对TiCrN薄膜微观结构和性能的影响规律,实现薄膜沉积工艺的优化。采用电弧离子镀方法,通过改变脉冲偏压占空比在M2高速钢基体和单晶硅片上沉积TiCrN薄膜。研究发现,脉冲偏压占空比的增大有助于减少膜层表面大颗粒数量,改善膜层表面质量;占空比从10%增加到60%,TiCrN薄膜厚度先增大后减小,30%占空比时,TiCrN薄膜的厚度达到最大值623.8 nm,60%占空比时,TiCrN薄膜的厚度达到最小值517.4 nm。当脉冲偏压占空比为10%时,Cr元素含量为33.9 at.%,晶粒尺寸达到最小值12.692 nm,纳米硬度和弹性模量分别为29.22 GPa和407.42 GPa。当脉冲偏压占空比为30%时,Cr元素含量达到最小值33.07 at.%,此时TiCrN薄膜晶粒尺寸达到最大值15.484 nm,纳米硬度达到最小值25.38 GPa,稳定摩擦因数达到最大值0.9。所制备的TiCrN薄膜均以(220)晶面为择优取向,晶粒尺寸在12.692~15.484 nm,纳米硬度都在25 GPa以上,是M2高速钢的2.8倍以上。在脉冲偏压占空比为20%时,TiCrN薄膜摩擦因数最小为0.68,磨痕宽度为0.63 mm,自腐蚀电位达到最大值-0.330 V(vs SCE),自腐蚀电流密度达到最小值0.255μA/cm~2,腐蚀速率最低,耐腐蚀性能最强。与M2高速钢基体相比,Ti CrN薄膜的硬度、耐腐蚀和摩擦磨损性能都显著提升,Cr元素和离子轰击作用是影响TiCrN薄膜性能的主要因素。研究结果为硬质薄膜工艺优化提供了一定的试验依据,TiCrN薄膜在刀具材料性能提升方面有较好的应用前景。
With the requirements of high-speed steel material cutting and machining are increasingly in high advanced manufacturing fields,there is an urgent need using nitride films to improve the hardness of the substrate materials and wear resistance and other comprehensive properties.Meanwhile the service life of high-speed steel materials is extended.The effects of the pulsed bias duty cycle on the microstructure and properties of TiCrN films were investigated to optimize the deposition process parameters and improve the properties of TiCrN films.TiCrN films subjected to different pulsed bias duty cycles were deposited onto M2 high-speed steel(HSS) substrates and Si wafers using the arc ion-plating method.The surface morphology,elemental composition,phase structure,and nanohardness of the TiCrN films were examined using scanning electron microscopy,energy-dispersive spectrometry,X-ray diffraction,and nanohardness indentation.The corrosion behaviors and tribological properties of the coated and uncoated M2HSS samples were examined using an electrochemical workstation and a pin-on-disk tribometer at room temperature.Potentiodynamic polarization curves were used to calculate the self-corrosion potential and self-corrosion current density of the tested samples in a 3.5 wt.% NaCl solution.With an increase in the pulsed bias duty cycle from 10% to 60%,the amount of macroparticles on the TiCrN film surfaces decreased,and the surface quality improved.At pulsed bias duty cycle of 10%,the maximum amount of macroparticles was 175,whereas at pulsed bias duty cycle of 60%,the minimum amount of macroparticles was 85.The thicknesses of the TiCrN films ranged from 517.4 to 623.8 nm.The TiCrN film thickness showed a trend of increasing at pulsed bias duty cycles of 10%-30% and decreasing at pulsed bias duty cycles of 30%-60%.At pulsed bias duty cycle of 30%,the thickness of the TiCrN film reached the maximum value of 623.8 nm.At pulsed bias duty cycle of 60%,the minimum thickness was 517.4 nm.At pulsed bias duty cycle of 10%,the Cr con
作者
魏永强
顾艳阳
范梦圆
杨佳乐
张华森
张晓晓
钟素娟
廖志谦
WEI Yongqiang;GU Yanyang;FAN Mengyuan;YANG Jiale;ZHANG Huasen;ZHANG Xiaoxiao;ZHONG Sujuan;LIAO Zhiqian(School of Aerospace Engineering,Zhengzhou University of Aeronautics,Zhengzhou 450046,China;Zhengzhou Research Institute of Mechanical Engineering Co.,Ltd.,Zhengzhou 450001,China;725 Research&Development Institute of China Shipbuilding Industry Group Co.,Ltd.,Luoyang 471023,China)
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2023年第6期57-67,共11页
China Surface Engineering
基金
国家自然科学基金(51401182)
中国国家留学基金(CSC202108410274)
河南省科技攻关计划(222102220066)
河南省高层次人才国际化培养和郑州航空工业管理学院科研团队(23ZHTD01010)资助项目。
