摘要
综述了离子束表面工程技术近期研究进展,重点讨论了等离子体浸没离子注入(PIII)、强流脉冲离子束技术(HIPIB)、等离子体喷涂物理气相沉积(PS-PVD)、电子回旋共振(ECR)等离子体和磁过滤阴极真空弧沉积等表面工程技术;介绍了离子束表面工程在替代传统电镀技术、航空航天材料表面改性、太阳能利用中材料的表面改性、生物医学材料的表面改性等领域的应用。指出了离子束表面工程技术的未来研究方向,即深入研究离子束与材料表面的作用机理,开发高性能结构涂层和功能涂层,发展新的离子束复合表面技术。
This paper summarizes the research and development of ion beam surface engineering technology. The plasma immersion ion implantation （PIII）, intense pulsed ion beam technology （HIPIB）, plasma spray physical vapor deposition （PS-PVD） and electron cyclotron resonance （ECR） plasma, filtered cathodic vacuum arc deposition are discussed. The applications of ion beam surface engineering in the areas of alternative to traditional electroplating technology, surface modification of aerospace materials, surface modification of ma- terials used for solar energy exploiture, and surface modification of biomedical materials are introduced. The future development of the ion beam surface engineering technology is pointed out, i. e. , the in-depth study on mechanism of effect of the ion beam and the surface of the material, development of high performance struc- tural and functional coatings, and development of new ion beam composite surface technologies.
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2012年第5期6-14,共9页
China Surface Engineering
基金
装备预研基金(代号略)
关键词
离子束
表面工程
技术
进展
ion beam
surfaces engineering
technology
development
