摘要
为解决原子力显微镜(Atomic Force Microscope,AFM)系统更换探针后光路调整复杂耗时、精度不足的问题,本文首次提出通过精密控制探针与探针夹装配位置来实现更换的探针相对AFM系统原光路位置的一致,进而实现免去AFM系统换针后调整光路步骤。该系统的光路一致性组件采用光束偏转法对探针位置与偏转进行放大与监测,并使用高精度位移与角度调节平台进行探针相对于探针夹的方位调整。通过实物搭建对探针一致性效果进行了验证,并对紫外光(Ultraviolet,UV)胶水固化过程导致探针位置偏移影响;探针不同偏移量时产生的探测器噪音对AFM系统成像质量影响进行了系统分析。实验结果表明:经由该系统装配的探针平均位置精度接近1.1μm;并且在AFM系统中更换一致性探针仅需8 s。该系统实现了高精度且质量稳定的探针一致性装配,极大地简化了AFM系统重新校准光路的操作步骤,其与自动换针装置配合可有效提升工业计量型AFM的操作与测量性能。
To solve the problem of complex and time-consuming optical path adjustment after probe replacement in Atomic Force Microscope(AFM)systems,this paper presents the first proposal to achieve the consistency of the replaced probe with respect to the original optical path position of the AFM system by precisely controlling the probe and probe holder assembly position,thus eliminating the need to adjust the optical path after needle replacement in AFM systems.The optical path consistency component of the system used the beam deflection method to amplify and monitor the probe position and deflection,and used a high-precision displacement and angle adjustment platform to adjust the orientation of the probe relative to the probe clip.The probe consistency effect was verified by physical construction,and the impact of probe position deflection due to Ultraviolet(UV)glue curing process;the impact of detector noise on the imaging quality of the AFM system when the probe is deflected by different amounts was systematically analyzed.The experimental results show that the average position accuracy of the probes assembled by the system is close to 1.1μm,and it takes only 8 seconds to change the consistent probes in the AFM system.The system achieves high precision and consistent probe assembly,which greatly simplifies the operation of the AFM system to recalibrate the optical path,and can effectively improve the operation and measurement performance of industrial metrology AFM when combined with the automatic needle changing device.
作者
张宝良
梁文峰
杨铁
于鹏
ZHANG Baoliang;LIANG Wenfeng;YANG Tie;YU Peng(School of Mechanical Engineering,Shenyang Jianzhu University,Shenyang 110168,China;State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China;Institutes for Robotics and Intelligent Manufacturing,Chinese Academy of Sciences,Shenyang 110169,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2024年第2期137-147,共11页
Optics and Precision Engineering
基金
国家重点研发计划资助项目(No.2021YFB3201600)。
关键词
原子力显微镜
探针装配
光束偏转法
微米级位移调节
Atomic Force Microscopy(AFM)
probe assembly
beam deflection method
micron-level displacement adjustment
