摘要
微陀螺仪是一种基于科里奥利原理或萨格拉克效应以测量角速度幅度及频率变化的惯性微传感器件,其在航空航天、无人设备、制导弹药等领域具有异常广泛的应用需求.基于微机电系统的传统微陀螺仪因噪声较大难以进一步获得性能上的较大突破.本文提出一种基于腔光力检测架构的新型微光机电系统高精度微陀螺仪结构,能在低功耗下实现超高精度角速度测量.基于光机械耦合理论,详细分析了该新型高精度微陀螺仪的工作机理和实现原理,并通过仿真验证及优化,得出其理论角速度测量灵敏度为122.2 mV/(°/s),角度随机游走为0.95°/h1/2,在相同量级惯性质量大小情况下,该新型微陀螺仪的精度明显优于传统微机电系统陀螺仪性能.
Micro-gyroscope is an inertial microsensor based on Coriolis principle or Sagnac effect to measure the angular rate amplitude and frequency change,which has a wide range of applications in aerospace,unmanned equipment,guided munitions.Due to the large noise,the traditional micro-gyroscopes are difficult to achieve a great breakthrough in performance.Therefore,a novel high-precision micro-gyroscope structure based on optomechanical system is proposed in the paper,which can realize ultra-high precision angular rate measurement under low power consumption.Based on the theory of opto-mechanical coupling,the working and implementation principle of the new high-precision microgyroscope are analyzed theoretically in detail.Through simulation verification and optimization,it is concluded that the theoretical angular rate measurement sensitivity is 122.2 mV/(°/s)and angle random walk is 0.95°/h1/2.Under the same order of inertia mass,the performance of the new micro-gyroscope is obviously better than the traditional MEMS gyroscopes.
作者
闫兴
黄文逸
李喆
陈凯
邓光伟
文光俊
黄勇军
YAN Xing;HUANG WenYi;LI Zhe;CHEN Kai;DENG GuangWei;WEN GuangJun;HUANG YongJun(School of Information and Communication Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054,China)
出处
《中国科学：物理学、力学、天文学》
CSCD
北大核心
2023年第11期133-144,共12页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家自然科学基金(编号:62371106,U2230206,12074058,61971113)
国家重点研发计划青年科学家项目(编号:2022YFA1405900)
ZB-教育部联合基金(编号:8091B022126)
JW科技委173基金(编号:2021-JCJQ-JJ-0667)
四川省科技计划(编号:2021YJ0089,2022YFG0230,2023YFG0040)资助。
关键词
微陀螺仪
腔光力系统
高精度角速度测量
micro-gyroscope
optomechanical systems
high precision angular rate measurement
