摘要
相较于传统的普通加速度计微机械加速度计具有许多的优势,在众多领域得到了广泛应用。微机械加速度计一般分为电容式、压电式、压阻式、谐振式、隧道电流式、光电式和热对流式,其中,热对流加速度计因其抗冲击强度能够达到自身材料的强度而广泛研究。详细阐述了国内外已有的热对流加速度计的结构原理、制造工艺和性能指标,从模拟仿真出发,给出了单轴延伸到三轴的研究现状。
Micro-electro-mechanical system（ MEMS） accelerometer has many advantages compared with traditional accelerometer,and has been widely applied in many fields,Among them,the thermal convective accelerometer has been studied widely for its shock strength can achieve the strength of the material itself. The structure principle,manufacturing process and performance index of thermal convective accelerometer both at home and abroad are described in detail. Based on simulation,research statuses from uniaxial to three-axis are listed.
作者
叶剑飞
刘晓阳
YE Jian-fei;LIU Xiao-yang(School of Electronic Information,Hangzhou Dianzi University,Hangzhon 310018,China)
出处
《传感器与微系统》
CSCD
2018年第10期5-7,共3页
Transducer and Microsystem Technologies
基金
浙江省自然科学基金资助项目(LQ16E070002)
国家自然科学基金资助项目(61411136003)
关键词
热对流式
微机械
市场应用
发展前景
thermal convection
micromachinery
market application
development prospects
