摘要
探究了腔室形状、工作气体参数及驱动信号的占空比、功率对单轴MEMS热膨胀流陀螺灵敏度的影响,通过设置最佳参数对陀螺性能进行优化。通过COMSOL软件建立了陀螺的三维模型,计算了敏感元件的温度场和等温线的变化情况。优化后的计算结果表明,输入角速度在[-1080(°)/s, 1080(°)/s]范围内时,使用体积更小的不完整下腔室,SF6作为腔室的工作气体,在加热器频率为10 Hz、占空比为50%、功率为50 mW最优参数的条件下,热膨胀流陀螺的结构灵敏度为0.1229 K·s/(°),非线性度为8.26%。优化后热膨胀流陀螺的结构灵敏度提高了1.28倍,非线性度降低了41.5%。该数值分析结果为陀螺的工艺制备、性能分析奠定了基础。
The influence of the chamber shape, working gas parameters, drive signal duty cycle and power on the sensitivity of the single axis MEMS thermal expansion fluid gyroscope was explored. And the gyroscope performance was optimized. The three-dimensional model of the gyroscope was established by the COMSOL software, and the temperature field and the isotherms of the sensitive element were calculated. The optimized calculation results show that when the input angular velocity is in the range of [-1080(°)/s, 1080(°)/s], the structure sensitivity of the thermal expansion flow gyro is 0.1229 K·s/(°), and the nonlinearity is 8.26% under the condition that the frequency of the heater is 10 Hz, the duty ratio is 50%, and the power is 50 MW, and the smaller incomplete lower chamber, and SF6 is used as the working gas of the chamber. After the optimization, the structure sensitivity of the thermal expansion flow gyro is increased to 1.28 times, and the nonlinearity is reduced to 0.415 times. The numerical analysis results provide the foundation for the process preparation and performance analysis of the gyro.
作者
朴林华
李备
佟嘉程
张严
PIAO Linhua;LI Bei;TONG Jiacheng;ZHANG Yan(Beijing Key Laboratory for Sensor,Beijing Information Science and Technology University,Beijing 100192,China)
出处
《电子元件与材料》
CAS
北大核心
2023年第1期69-75,共7页
Electronic Components And Materials
基金
国家自然科学基金(61771060)
北京市新世纪百千万人才工程培养资助项目(2019A20)
北京市自然科学基金重点项目(KZ201511232034)
北京市重点实验室开放课题资助项目(2021202209)
北京信息科技大学学科与研究生教育校内项目(202205D)
北京信息科技大学北京市传感器重点实验室资助(202212)
现代测控技术教育部重点实验室资助(20222023D)。
