摘要
氮化硅陶瓷以其优良的抗弯强度、抗腐蚀、抗热震、抗氧化和尺寸稳定等性能,在航空航天、能源、冶金和半导体等领域表现出巨大的应用潜力和市场前景.然而,加工性差、界面难润湿等特点极大阻碍了氮化硅陶瓷的应用.为此,人们不断探索研究氮化硅陶瓷的连接,以期通过可靠的连接方法促进其应用发展与突破.本文综述了近年来氮化硅陶瓷连接的研究进展,指出当下氮化硅陶瓷连接的研究主要集中在调控界面结构和控制界面应力以提高连接强度,其中根据Si_(3)N_(4)陶瓷的特点,评述例举了固相扩散、部分瞬间液相扩散、金属钎焊和玻璃钎焊等方法在氮化硅陶瓷接头界面结构调控方面的研究进展,归纳总结了氮化硅陶瓷接头界面应力控制的研究现状,最后展望了今后氮化硅陶瓷连接的研究重点与方向,旨在为氮化硅陶瓷连接的研究提供参考.
Silicon nitride ceramics have shown tremendous application potential and market prospects in fields such as aerospace,energy,metallurgy,and semiconductors due to their excellent properties such as high flexural strength,corrosion resistance,thermal shock resistance,oxidation resistance,and dimensional stability.However,the poor processability and difficulties in wetting interfaces have greatly hindered the application of silicon nitride ceramics.Therefore,continuous exploration and research on the joining of silicon nitride ceramics have been conducted to promote their application development and breakthroughs through reliable connection methods.This article reviews the recent research progress in the joining of silicon nitride ceramics,emphasizing that the current research on silicon nitride ceramic joining focuses on modulating interface structure and controlling interface stress to enhance the joint strength.Based on the characteristics of silicon nitride ceramics,various methods such as solid-state diffusion,partial transient liquid-phase diffusion,metal brazing,and glass brazing are discussed to illustrate the research progress in interface structure modulation of silicon nitride ceramic joints.The research status of interface stress control in silicon nitride ceramic joints is summarized.Finally,the future research focus and direction of silicon nitride ceramic joining are outlined,aiming to provide references for further research on silicon nitride ceramic joining.
作者
赵上强
雷云
马文会
陈永泰
谢明
方继恒
ZHAO Shangqiang;LEI Yun;MA Wenhui;CHEN Yongtai;XIE Ming;FANG Jiheng(Faculty of Metallurgical and Energy Engineering,Kunming University of Science and Technology,Kunming 650093,China;State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals,Sino-Platinum Metals Co.,Ltd.,Kunming 650106,China;Faculty of Material Science and Engineering,Kunming University of Science and Technology,Kunming 650093,China)
出处
《昆明理工大学学报（自然科学版）》
北大核心
2023年第5期16-27,119,共13页
Journal of Kunming University of Science and Technology(Natural Science)
基金
国家自然科学基金项目(52101040)
云南省科技人才与平台计划项目(202105AE160027)。
关键词
氮化硅陶瓷
扩散连接
钎焊
界面结构
界面应力
连接强度
silicon nitride ceramics
diffusion bonding
brazing
interface structure
interface stress
bonding strength
