摘要
随着太赫兹技术的发展,对高工作频段太赫兹金属矩形波导的需求日益迫切,然而,因其腔体端面尺寸和圆角半径较小、表面粗糙度要求严格,精密加工极具挑战性。文章针对太赫兹微金属矩形波导制造用的凹型微腔精密制造问题进行了研究,利用微细电解线切割加工技术、电化学沉积金及电化学沉积铜等电化学制造技术的组合,实现了端面尺寸为124.3μm×253.2μm、表面粗糙度Ra<0.1μm、圆角半径R<8μm的1THz金属矩形波导凹型微腔的制造,为高工作频段的组合式太赫兹金属矩形波导制造奠定了基础。
The requirements of terahertz metal rectangular waveguides with a high-working-frequency have become increasingly urgent with the rapid development of terahertz technology. However, the precision fabrication of high-working-frequency terahertz metal hollow-core rectangular waveguides is difficult due to its cavity characteristics of small end face size and edge radius, strict surface roughness. In this paper, the precision fabrication of terahertz metal rectangular waveguide concave microcavity was studied., wire electrochemical micromachining, gold electrochemical deposition, and copper electrochemical deposition were combined. A terahertz metal hollow-core rectangular waveguide concave microcavity with end face size of 124.3 μm×253.2 μm, edge radius less than 8 μm and internal surface roughness less than 0.1 μm were obtained, which provides the basis for the combined fabrication of terahertz metal hollow-core rectangular waveguide.
作者
毕晓磊
程雪利
BI Xiaolei;CHENG Xuelil(School of Mechnical Engineering,Henan Institute of Technology,Xinxiang 453003,China;Xinxiang Additive Manufacturing Engineering Technology Research Center,Xinxiang 453003,China;Henan Province Mechanical and Electrical Equipment Digital Design and Manufacturing Engineering Technology Research Center,Xinxiang 453003,China)
出处
《河南工学院学报》
CAS
2023年第4期1-6,26,共7页
Journal of Henan Institute of Technology
基金
河南省重点研发与推广专项(222102220038)
河南工学院高层次人才科研启动基金(KQ2104)。
关键词
太赫兹金属空芯矩形波导
微细电解线切割加工
电化学沉积金
电化学沉积铜
terahertz metal hollow-core rectangular waveguide
wire electrochemical micromachining
gold electrochemical deposition
copper electrochemical deposition
