摘要
Micro LED技术作为下一代显示技术的前沿研究领域,具备高亮度、高对比度和高能效等优势。回顾了Micro LED技术的发展历程,重点介绍了其技术难点以及当前的进展情况。技术难点包括外延结构设计、芯片制备中的尺寸效应、全彩化问题、Micro LED系统集成和可靠性研究。当前的进展涵盖了侧壁效应抑制、全彩化方案、巨量转移技术、氮化物红光技术、色转换技术、垂直堆叠技术、CMOS和TFT驱动、三维集成技术、透明显示以及纳米LED。最后展望了Micro LED技术的未来发展方向,包括解决技术难题、推动产业化进程和实现更广泛的应用。
Micro LED technology,as a cutting-edge research field in next-generation display tech-nology,has advantages such as high brightness,high contrast,and high energy efficiency.The devel-opment process of Micro LED technology has been reviewed,focusing on its technical difficulties and current progress.The technical difficulties include epitaxial structure design,size effects in chip prepa-ration,full color issues,Micro LED system integration,and reliability research.The current progress covers sidewall effect suppression,full color scheme,massive transfer technology,nitride red light technology,color conversion,vertical stacking,CMOS and TFT driving,3D integration,transpar-ent display,and nano LED.Finally,an outlook on the future development direction of Micro LED technology has been proposed,including addressing technical challenges,promoting industrialization,and achieving wider applications.
作者
周佳
闫金健
刘志强
江莹
包洋
黄凯
李金钗
周德云
ZHOU Jia;YAN Jinjian;LIU Zhiqiang;JIANG Ying;BAO Yang;HUANG Kai;LI Jinchai;ZHOU Deyun(School of Microelectronics,Northwestern Polytechnical University,Xi'an 710192,CHN;College of Physical Science and Technology,Xiamen University,Xiamen Fujian361000,CHN;Xiamen Future Display Technology Research Institute,Xiamen Fujian 361000,CHN;School of Electronic and Information,Key Laboratory of Aerospace Electronic Information Perception and Optoelectronic Control,Ministry of Education,Key Laboratory of Intelligent Aerospace Electronic System Technology,Ministry of Industry and Information Technology,Northwestern Polytechnical University,Xi'an 710192,CHN)
出处
《光电子技术》
CAS
2023年第2期91-113,共23页
Optoelectronic Technology
基金
国家重点研发计划(2021YFB3600101)
国家自然科学基金(62174141)。
