摘要
多晶硅生产中尾气回收装置送至精馏的回收料,通常需要经过脱重—脱轻或者脱轻—脱重两个塔精馏才能得到合格的产品。最新的精馏工艺采用隔壁塔,用一个塔实现了二氯二氢硅、三氯氢硅、四氯化硅的分离。应用Aspen Plus软件模拟这三种工艺流程,并从能耗、设备投资等角度进行了对比分析。结果表明,在相同的进料组成、分离要求、操作压力的前提下,隔壁塔流程无论是从能耗方面,还是成本投资方面均是最优方案。研究了隔壁塔流程中回流比、进料位置以及侧采位置对产品质量的影响。
Aiming at geting qualified products in production of polysilicon,the recovery material sent to the distillation device by the exhaust gas recovery device usually needs to go through two columns of distillation,removing light components after heavy components removal or removing heavy components after light components removal.In up to date distillation process,a dividing wall column is used to separate dichlorosilane,trichlorosilane and silicon tetrachloride.These three processes were simulated by Aspen Plus software,and compared in respects of energy consumption and equipment investment.The results show that,under same feed composition,separation requirements and operating pressure,the process of dividing wall column is the best solution both in terms of energy consumption and cost investment.The influences of reflux ratio,feed stage and the TCS product location were investigated.
作者
陈静
刘继三
明勇
CHEN Jing;LIU Jisan;MING Yong(Hualu Engineering&Technology Co.,Ltd,Xi'an 710065,China;Sichuan Yongxiang New Energy Co.Ltd,Leshan 614802,China)
出处
《能源工程》
2023年第4期24-28,共5页
Energy Engineering
关键词
多晶硅
精馏
模拟
隔壁塔
polysilicon
distillation
simulation
dividing wall column
