摘要
真空法具有沉积速率快、重复性高以及成膜质量高等优势,有望成为大规模生产铜锌锡硫硒(Cu_(2)ZnSn(S,Se)_(4),CZTSSe)薄膜太阳电池的制备方法。主要介绍了热蒸发法、磁控溅射法和脉冲激光沉积法等三种沉积CZTSSe薄膜的方法,阐述了采用真空法制备CZTSSe薄膜太阳电池的研究进展,同时对各种方法的优化途径(如退火条件优化、掺杂、背接触改善等)进行对比分析。最后,阐明了真空法的潜在优势以及存在的问题,并对未来发展进行展望。
Vacuum-based method is a promising preparation method for the large-scale production of(Cu_(2)ZnSn(S,Se)_(4),CZTSSe)thin film solar cells due to the advantages of fast deposition rate,high repeatability and high film-forming quality.Three different kinds of methods for CZTSSe thin films deposition are introduced,namely thermal evaporation method,magnetron sputtering method and pulsed laser deposition method,and the research progress of CZTSSe thin film solar cells prepared by vacuum-based methods is summarized.Meanwhile,the optimization ways by various methods(such as optimized annealing condition,doping,back contact improvement,etc.)are compared and analyzed.Finally,the potential advantages and existing problems of vacuum-based methods are clarified,and future development is prospected.
作者
胡兴欢
余纳
王书荣
Hu Xinghuan;Yu Na;Wang Shurong(Key Laboratory of Rural Energy Engineering in Yunnan Province,Yunnan Normal University,Kunming 650500,China)
出处
《半导体技术》
CAS
北大核心
2022年第12期933-945,共13页
Semiconductor Technology
基金
国家自然科学基金资助项目(1902218)。
关键词
铜锌锡硫硒(CZTSSe)
真空法
薄膜
太阳电池
光电转换效率
copper zinc tin sulfur selenium(CZTSSe)
vacuum-based method
thin film
solar cell
photoelectric conversion efficiency
