摘要
针对不同结构的微光学元件的波前相位检测,传统数字全息三维场重建方法不能有效重建物光波的部分频谱分量,导致微光学元件的相位测量精度不高。本文提出了一种基于频域稀疏采样的压缩感知相位重建方法,该方法在数字全息的再现过程中结合压缩感知的稀疏特性,对全息图的频谱信息进行稀疏减采样,并利用小波变换域内的多尺度特性,实现物光波有效频谱信息的压缩重建,再经过傅里叶逆变换得到重建物光波的相位分布。最后,通过微透镜阵列及相位分辨率板的测试对该方法进行验证,实验结果表明:该方法稀疏减采样的同时能够实现波前相位的精确测量,与传统数字全息的相位重建结果进行残差估计,残差的峰谷值和均方根值分别降低了26.97%和15.04%。
Digital holographic microscopy plays an important role in the surface topography measurement of micro-optical elements.It is based on the interference superposition of waves,and realizes the measurement of three-dimensional information of objects through digital recording and diffraction reproduction.However,due to the interference of background information in the process of microscopic imaging,there are some problems such as poor focusing effect and unsatisfactory image quality.For the wave-front phase detection of micro-optical elements with different structures,the traditional digital holographic 3D field reconstruction method cannot effectively reconstruct part of the angular spectrum components of object light wave,resulting in low accuracy of the wave-front phase measurement of microoptical elements.Therefore,this paper proposes a phase reconstruction method of compressed sensing based on sparse sampling in the frequency domain.In combination with the characteristic that most phase information is contained in the frequency domain,the sparse characteristics of compressed sensing theory are utilized to conduct random sparse sampling of the spectrum information of holograms during the reconstruction process of the traditional digital holographic reconstruction algorithm.The effective spectral information of the reconstructed object is recovered in the domain of wavelet transform,and then the frequency domain is transformed into the spatial domain by Fourier inverse transform,and the complex amplitude distribution of the reconstructed object is obtained.Finally,experimental research is carried out for continuous and discontinuous phase objects,and the phase reconstruction results of higher quality than the traditional method are obtained by analyzing the quality of phase image reconstruction and the accuracy of 3D reconstruction,respectively,and the accurate measurement of the phase information of the object is realized.After spectral filtering in the frequency domain is carried out by the traditional method,it
作者
蒙彬钧
刘丙才
杨栋
王红军
朱学亮
钱晓彤
牛瑞
田爱玲
MENG Binjun;LIU Bingcai;YANG Dong;WANG Hongjun;ZHU Xueliang;QIAN Xiaotong;Niu Rui;TIAN Ailing(School of Ordnance Science and Technology,Xi’an Technological University,Xi'an 710021,China;Shaanxi Province Key Laboratory of Membrane Technology and Optical Test,Xi'an 710021,China;CCIC West Testing Company Limited,Xi'an 710032,China)
出处
《光子学报》
EI
CAS
CSCD
北大核心
2022年第11期382-390,共9页
Acta Photonica Sinica
基金
陕西省科技厅项目(No.2022JM-345)
基础科研项目(No.JCKY2018426C002)
西安市智能兵器重点实验室(No.2019220514SYS020CG042)。
关键词
光学测量
数字全息
稀疏采样
压缩感知
相位重建
Optical measurement
Digital holography
Sparse sampling
Compressive sensing
Phase reconstruction
