摘要
基于谐振腔理论设计了一款适合在超高温下工作的无线无源温度传感器。通过对传感器进行建模分析,研究了传感器的各项参数对谐振频率的影响,确定了传感器的最佳结构尺寸。并且根据优化结果进行传感器的制作。该传感器以氧化铝陶瓷作为基底,采用丝网印刷技术将缝隙天线集成到基底上。最后,搭建测试平台对传感器的性能进行测试。结果表明,25~400℃时传感器的灵敏度为66.667 kHz/℃,400~1 000℃时传感器的灵敏度为216.667 kHz/℃。经过实验测试证明该传感器可应用于航空航天等领域的高温测量。
Based on the resonant cavity theory, a wireless passive temperature sensor suitable for working at ultra-high temperature was designed. Through modeling and analysis of the sensor, the influences of various parameters of the sensor on the resonant frequency were studied, and the optimal structure size of the sensor was determined. And according to the optimization result, the sensor was fabricated. The alumina ceramic was used as the substrate of the sensor, and the slot antenna was integrated on the substrate by the screen printing technology. Finally, a test platform was built to test the performances of the sensor. The results show that the sensitivities of the sensor are 66.667 kHz/℃ at 25-400 ℃ and 216.667 kHz/℃ at 400-1 000 ℃, respectively. The experimental test proves that the sensor can be used for high temperature measurement in the aerospace and other fields.
作者
许福佳
苏淑靖
张丽丽
任婷
Xu Fujia;Su Shujing;Zhang Lili;Ren Ting(School of Instrumentand Electronics;StateKey Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)
出处
《微纳电子技术》
CAS
北大核心
2022年第9期905-910,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(51875534)
创新研究群体科学基金资助项目(51821003)。
关键词
传感器
谐振腔
无线无源传感器
高温
氧化铝陶瓷
谐振频率
sensor
resonant cavity
wireless passive sensor
high temperature
alumina ceramic
resonant frequency
