摘要
为了实现高温、机械旋转和密闭空间等恶劣环境中的原位温度测量,以高居里点的铁电陶瓷为温度敏感介质材料,在传统低温共烧陶瓷(LTCC)工艺的基础上,采用牺牲层填充技术,保证了制备过程的工艺兼容性,成功制备出了一种基于LTCC衬底的新型无源电容式温度传感器。通过外部读取天线与传感器线圈的互感耦合,实现了从常温至700℃的传感器温度特性测试,测试结果表明:这种电容式温度传感器具有良好的温度敏感特性,其平均灵敏度为-7.33 kHz/℃。
In order to fulfill in-situ measurement of temperature in harsh environments, such as high temperature, mechanical rotating and hermetical space, etc, a kind of high Curie point ferroelectric ceramic is used as temperature sensitive material, based on conventional low temperature co-fired ceramic （LTCC）technology, sacrificial layer filling technology is used to guarantee processing compatibility of fabrication process, and a novel passive capacitive temperature sensor based on LTCC substrate is fabricated successfully. By using mutual coupling between the external reader antenna and sensor coil, temperature characteristic test is realized from room temperature to 700 ℃, and test result shows that this kind of capacitive temperature sensor has good temperature sensitive characteristics,and average sensitivity is -7.33 kHz/℃.
出处
《传感器与微系统》
CSCD
北大核心
2014年第5期77-79,83,共4页
Transducer and Microsystem Technologies
