摘要
锆钛酸铅(PZT)具有灵敏度高,响应速度快及压电常数大等优点,已被广泛应用于触觉传感器及超声换能器等领域。该文首先对基于PZT的触觉传感器的原理及制作工艺进行了阐述,再从材料优化、结构优化、柔弹性优化和可扩展性优化4个方面概述了PZT触觉传感器的研究进展,讨论了其在运动检测、医疗健康和人机交互领域的实际应用,最后对PZT触觉传感器的不足和未来发展趋势进行了分析。
The lead zirconate titanate(PZT)is widely used in tactile sensors,ultrasonic transducers and other fields because of its high sensitivity,fast response and large piezoelectric constant.First,the principle and fabrication process of PZT-based tactile sensor is described in this paper.Then,the research progress of PZT tactile sensor is summarized from four aspects of material optimization,structure optimization,flexibility optimization and scalability optimization,and its practical applications in the fields of motion detection,medical health and human-computer interaction are discussed.Finally,the shortcomings and future development trend of PZT tactile sensor are analyzed.
作者
宁俐彬
高国伟
NING Libin;GAO Guowei(Key Laboratory of Sensors,Beijing Information Science and Technology University,Beijing 100192,China;Key Laboratory of Modern Measurement and Control Technology,Ministry of Education of China,Beijing Information Science and Technology University,Beijing 100101,China)
出处
《压电与声光》
CAS
北大核心
2022年第4期625-637,共13页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(U20A20167,62071054)。
关键词
锆钛酸铅
触觉传感器
压电
柔性
lead zirconate titanate
tactile sensor
piezoelectric
flexible
