摘要
在基于Zygo干涉仪的非球面检测中,沿光轴(Z轴)方向的定位精度直接影响测量结果的准确性。本文提出了一种基于最小PV值的非球面测量Z轴定位方法,分析了非球面与参考球面波的理论模型,推导出了对应的最佳参考球面波半径、顶点偏离量以及理论测量位置,并在此基础上完成了沿Z轴方向0.001 mm精度范围内的定位过程。该方法可将被测非球面定位至理论测量位置,有效地降低由于定位误差造成的测量误差;准确找到参考球面波半径,对基于Zygo干涉仪的点云重构和拼接方法也具有重要意义。对一直径为108 mm的非球面镜进行了实验验证,定位后的结果与最佳参考球面波的点云数据计算结果对比,结果接近,证明了定位方法的正确性;并与零位检测结果相比,PV值残差为0.047λ,RMS残差为0.019λ,进一步证明了该定位方法的准确性。
In aspheric surface detection based on the Zygo interferometer, the precision of the aspheric surface′s location along the optical axis(Z-axis) direction has direct effect on the accuracy of the measurement results. This article proposes a Z-axis positioning method for aspheric measurements based on the minimum PV value. The theoretical model of aspheric and reference spherical waves is evaluated, and the appropriate reference spherical wave radius, vertex deviation, and theoretical measurement location are developed. The positioning procedure along the Z-axis direction is completed within 0.001 mm precision. The proposed method can precisely identify the theoretical measurement location and efficiently decrease the measurement error introduced by the positioning error. It can also precisely determine the reference spherical wave radius, which is essential for the point cloud reconstruction and stitching method based on the Zygo interferometer. The positioning of an aspherical mirror with a diameter of 108 mm is evaluated experimentally, and the positioning results are close to the calculated results of the point cloud data of the best reference spherical wave, demonstrating the method′s correctness. The PV residuals are 0.047 λ and the RMS residuals are 0.019 λ compared to the null testing results, which further demonstrates the positioning method′s accuracy.
作者
兰梦辉
李兵
魏翔
吴修远
刘晓
Lan Menghui;Li Bing;Wei Xiang;Wu Xiuyuan;Liu Xiao(State Key Laboratory of Mechanism Manufacture System Engineering,Xi'an Jiaotong University,Xi'an 710049,China;International Joint Laboratory for Mico/Nano Manufacturing and Measurement Technology,Xi'an Jiaotong Universily,Xi'an 710049,China;Suzhou Academy,Xi'an Jiaotong Universily,Suzhou 215123,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2022年第6期29-37,共9页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(52105482)
苏州市重点产业技术创新项目(SYG201922)
西安交通大学基本科研业务费—自由探索与创新类项目(xzy022021016)资助。
关键词
非球面检测
干涉测量
Z轴定位
最小PV值
aspheric detection
interferometry
Z-axis positioning
minimum PV-value
