摘要
为了测量离轴非球面镜的曲率半径、圆锥系数等参数,提出了一种使用激光跟踪仪快速测量二次非球面的方法。重点介绍了使用激光跟踪仪得到空间三维坐标后的数据处理方法。实验中对一离轴非球面反射镜进行了测量,通过非线性最小二乘拟合得到了其曲率半径及圆锥系数,拟合结果均方根误差(RMSE)约为1.6μm,确定系数约为0.999999954,所得曲率半径及圆锥系数与已有测量方法相差很小。理论分析以及实验结果表明,该方法简单通用,易于实施,数据处理过程快速可靠,适用于二次非球面镜曲率半径等参数的测量。
In order to measure the radius of curvature and conic factor of an off-axis aspheric mirror, a new method to measure the conic surface with a laser tracker is proposed. The data processing procedure after spatial 3D cordinates are obtained with the laser tracker is clearly explained. An off-axis reflecting aspheric mirror is tested in the experiment and the radius of curvature and conic factor are obtained using nonlinear least square fitting method. The root mean square error （RMSE） is only 1.6 ~trn while the coefficient of determination is up to 0. 999999954. Besides, the results of our method and the existing methods are nearly the same. Both theoretical analyses and experimental results demonstrate that this is a simple, general and easily operated method, which benefits from the fast and reliable data processing. The proposed method meets the measurement requirements of conic aspheric mirrors.
出处
《激光与光电子学进展》
CSCD
北大核心
2013年第9期92-97,共6页
Laser & Optoelectronics Progress
基金
吉林省科技发展计划(201000526)
关键词
测量
光学检测
离轴非球面
激光跟踪仪
曲率半径
曲面拟合
measurement
optical testing
off-axis asphere
laser tracker
radius of curvature
curved surface fitting
