摘要
三坐标测量机(CMM)是坐标测量技术中高效率的精密测量系统,随着超精密加工技术的发展,对三坐标测量机测量精度的要求越来越高。考虑到三坐标测量机在测量过程中的弱刚体性状态,提出了一种基于激光追踪仪多站位测量的三坐标测量机空域坐标修正方法。首先建立激光追踪仪多站位测量系统,然后利用激光追踪仪的高精度干涉测长值对被测空域内的三坐标测量机待测点坐标进行修正,最后利用三线性插值方法对三坐标测量机的被测空域坐标进行修正。仿真实验结果表明利用所提出的空域坐标修正方法得到的标准球直径标准差均值为0.098μm,小于三坐标测量机直接测量得到的标准差均值0.118μm,验证了所提出的方法可以有效提高三坐标测量机空域坐标精度。
Coordinate measuring machine （CMM） is a high efficiency precision measurement system for coordinate measurement technology. As the development of ultra-precision machining technology, the requirement of the measuring precision of CMM is getting higher and higher. Considering the weak rigid body state of CMM in the process of measurement, this paper proposes a CMM spatial coordinate correction method based on multistation measurement of laser tracer. Firstly, the laser tracer multistation measurement system is set up. Then, the coordinate of measuring point of CMM is corrected by using the high precision interference length of the laser tracer. Finally, the measuring spatial coordinate of CMM is corrected by using the trilinear interpolation method. The simulation experimental results show that the average of the standard deviation of the standard sphere diameter obtained by proposed spatial coordinate correction method is 0. 098 μm, which is smaller than 0. 118μm, the average of the standard deviation is directly measured by CMM. The results verify that the proposed method can effectively improve the spatial coordinate accuracy of CMM.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2017年第3期191-198,共8页
Chinese Journal of Lasers
基金
国家重大科学仪器设备开发专项(2013YQ17053904)
国家自然科学基金(50805003)
航天器高精度测量联合实验室基金项目
关键词
测量
三坐标测量机
激光追踪仪
多站位测量
坐标修正
measurement
coordinate measuring machine
laser tracer
multistation measurement
coordinate correction
