摘要
扫描反射镜在红外光学、空间遥感等领域有着重要应用,由于其薄壁特征以及铝合金材料质软性,在制造过程中极易产生加工变形,导致反射镜面形精度很难满足光学系统需求。本研究通过飞切仿真和装夹变形模拟,分析飞切加工中切削参数和装夹方式对扫描反射镜面形精度的影响。研究表明,采用较高的主轴转速、较低的进给速度和切削深度,可使工件表面张力和切削力减小,切削过程稳定;采用后端面支撑的方式进行装夹,可减小加工变形。对扫描反射镜进行飞切加工验证实验,并借助Zygo激光干涉仪检测面形精度,结果显示,加工后工件面形误差PV值为0.186μm,满足光学系统需求。
Scanning mirror has important applications in infrared optics, space remote sensing and other fields.Due to its thin-walled characteristics and the softness of aluminum alloy materials, it is extremely easy to produce processing deformation during the manufacturing process, which makes it difficult for the reflector to meet the requirements of the optical system.This study analyzes the influence of cutting parameters and clamping methods on the accuracy of the scanning mirror surface through flying-cutting simulation and clamping deformation simulation.Research shows that the use of higher spindle speed, lower feed speed and cutting depth can reduce the surface tension and cutting force of the workpiece, and the cutting process is stable.The clamping method is supported by the rear end surface, which can reduce the processing deformation.The flying-cutting processing verification experiment is performed on the scanning mirror, and its surface accuracy is tested with the help of Zygo laser interferometer.After processing, the PV value of the surface error of the workpiece is 0.186μm, which meets the requirements of the optical system.
作者
张万清
康杰
郭彦军
刘尧
姚同
邱红方
邹俊东
骆彦冰
Zhang Wanqing;Kang Jie;Guo Yanjun;Liu Yao;Yao Tong;Qiu Hongfang;Zou Jundong;Luo Yanbing(Yunnan KIRO Pho-tonics Co.,Ltd.,Kunming 650200,China;不详)
出处
《工具技术》
北大核心
2022年第7期104-108,共5页
Tool Engineering
关键词
扫描反射镜
飞切加工
装夹方式
面形精度
scanning mirror
fly cutting
clamping method
surface accuracy
