摘要
对GC-AED光谱分析检测技术在高纯特气分析检测领域做了应用研究,首次在国内实现高纯磷烷中锗烷杂质的分析检测,锗烷检出限低于0.5×10^(-9),为高迁移率电子器件及探测器外延应用提供有效指导。
The application of GC-AED spectral analysis and detection technology in the field of high-purity special gas analysis and detection was studied.The detection limit of germane in high-purity phosphine was lower than 0.5×10^(-9) for the first time in China,which provides effective guidance for the epitaxial application of high mobility electronic devices and detectors.
作者
朱颜
乔洋
陈化冰
黄呈熙
ZHU Yan;QIAO Yang;CHEN Huabing;HUANG Chengxi(Suzhou Nata Opto-electronic Material Co. , Ltd. , Suzhou 215028, China;Joint Analytical Systems Company, Newark 19713, Amercia)
出处
《低温与特气》
CAS
2022年第3期38-41,共4页
Low Temperature and Specialty Gases
