摘要
砷烷是发光二极管、超大规模集成电路、GaAs、GaAsP生长,N型硅外延、扩散、离子注入掺杂等不可缺少的重要原料,因此需要有极高的纯度。主要概述了砷烷常用的纯化方法,包括吸附法、低温冷冻/精馏法、膜分离法等。
Arsine is an indispensable and important raw material for light-emitting diodes,very large scale integrated circuits,GaAs,GaAsP growth,N-type silicon epitaxy,diffusion,ion implantation and doping,etc.,so it needs extremely high purity.The common purification methods of arsine are summarized,including adsorption,cryogenic freezing/rectification,membrane separation and so on.
作者
刘英杰
景显东
赵健
常琳
王雅婷
LIU Yingjie;JING Xiandong;ZHAO Jian;CHANG Lin;WANG Yating(Zhonghao Guangming Research and Design Institute of Chemical Industry Co. , Ltd. , Dalian 116031, China)
出处
《低温与特气》
CAS
2022年第3期9-13,共5页
Low Temperature and Specialty Gases
关键词
砷烷
纯化
应用进展
arsine
purification
application progress
