摘要
针对Pd-Ni合金薄膜氢气传感器的响应特性与零点稳定性受氧气氛影响的问题,分别用离子束溅射技术和原子层沉积技术制备了100 nm Pd-Ni合金薄膜氢气敏感电阻和10 nm Al;O;/SiO;/Al;O;复合隔离膜,并测试对比了有隔离膜和无隔离膜样品的氢敏响应特性和零点稳定性,分析了氧气氛影响氢敏特性与隔离膜阻氧透氢的机理。结果表明:复合隔离膜对灵敏度影响极小,起到了较好的透氢阻氧作用,大大改善了空气作为背景气体的氢敏响应特性和零点稳定性,但隔离膜对Pd-Ni合金薄膜氢气传感器的响应时间和恢复时间有负面影响。
The response characteristics and zero point stability of PdNi alloy thin film hydrogen sensor are affected by the oxygen atmosphere.To solve this problem,100 nm PdNi alloy thin film hydrogen sensitive resistance and 10 nm Al;O;/SiO;/Al;O;composite isolation film were prepared by ion beam sputtering and atomic layer deposition respectively.The hydrogen sensitive response characteristics and the zero point stability of samples with or without isolation film were tested and compared.The mechanism of oxygen affecting hydrogen sensitivity and oxygen barrier/hydrogen permeation of the isolation membrane were analyzed.The results showed that the composite isolation film had little effect on the sensitivity.It played a good role of oxygen barrier/hydrogen permeation and the hydrogen sensitivity response characteristics and zero point stability were greatly improved when air was the background gas.However,the isolation film had a negative effect on the response time and recovery time of PdNi alloy thin film hydrogen sensor.
作者
谢贵久
张璐
季惠明
张浩
XIE Guijiu;ZHANG Lu;JI Huiming;ZHANG Hao(Key Laboratory of Advanced Ceramics and Machining Technology,Ministry of Education,School of Materials Science and Engineering,Tianjin University,Tianjin 300350,China;The 48th Research Institute of China Electronics Technology Group Corporation,Changsha 410111,China)
出处
《载人航天》
CSCD
北大核心
2022年第3期338-343,共6页
Manned Spaceflight
关键词
薄膜
氢气传感器
隔离膜
Pd-Ni合金
透氢
阻氧
thin film
hydrogen sensor
isolation film
Pd-Ni alloy
hydrogen permeation
oxygen barrier
