摘要
借助磷掺杂多晶硅钝化接触结构卓越的钝化质量,n-TOPCon太阳电池可获得极佳的电学性能表现。在实际工业化制造过程,获得高性能量产n-TOPCon电池的关键之一是需要实现电池双面钝化结构的匹配与优化。对于硼扩散制备而成的电池正表面,工业上常采用叠层钝化膜沉积前添加热氧化工艺来优化钝化质量。该热氧化过程对n-TOPCon电池正反面钝化结构以及最终的电池电学性能可能造成的影响,进行了详细探究;发现热氧化过程可以优化重掺杂硼扩面的钝化质量,而对于轻掺杂硼扩面有害无益,同时热氧化会导致掺杂多晶硅钝化接触结构的钝化质量下降。未经过氧化处理的n-TOPCon电池在光注入退火工艺处理后可以获得更大的电学性能增益。使用无氧化工艺获得了平均效率达24.02%,最高效率为24.34%的量产n-TOPCon太阳电池。
N-TOPCon solar cells can achieve excellent electrical performance by the phosphorus-doped polysilicon passivating contact structures,due to its excellent passivation quality.In the industrial manufacturing process,the key to obtain high performance mass production n-TOPCon solar cells is to achieve the matching and optimization of the passivation structures on both sides.For the front emitter formed by boron diffusion,thermal oxidation process is often used to optimize the passivation quality before the deposition of the passivation films.The possible influence of the thermal oxidation process on the passivation structure of n-TOPcon solar cells and its electrical performance is investigated in detail.It is found that thermal oxidation process can optimize the passivation quality of heavily boron doped surface,while it is harmful to the lightly boron doped surface.Meanwhile,thermal oxidation will lead to the decrease of passivation quality of the doped polysilicon passivating contact.At the same time,n-TOPCon cells without peroxide treatment can obtain higher electrical performance gain after lighting injection annealing process.In the end,mass production of N-TOPCon solar cells with an average efficiency of 24.02%and a maximum efficiency of 24.34%is achieved by using an oxidation free process.
作者
陈文浩
王闻捷
于元元
陈鹏辉
郑波
袁声召
万义茂
CHEN Wenhao;WANG Wenjie;YU Yuanyuan;CHEN Penghui;ZHENG Bo;YUAN Shengzhao;WANG Yimao(School of Testing and Photoelectric Engineering, Nanchang Hangkong University, Nanchang 330063, China;Key Laboratory of Artificial Structures and Quantum Control (Ministry of Education),Institute of Solar Energy School of Physics and Astronomy, Shanghai Jiao Tong University,Shanghai 200240, China;Risen Energy Co., Ltd., Ningbo 315609, China)
出处
《功能材料》
CAS
CSCD
北大核心
2022年第2期2162-2166,2181,共6页
Journal of Functional Materials
基金
国家重点研发计划项目(2018YFB1500503)
南昌航空大学博士启动金项目(EA202108184)。
关键词
钝化接触结构
TOPCon
热氧化
钝化膜
晶硅太阳电池
passivating contact structure
TOPCon
thermal oxidation
passivation films
silicon solar cell
