摘要
N型隧穿氧化层钝化接触(Tunnel Oxide Passivating Contacts,TOPCon)太阳能电池完成印刷烧结后,再经过光注入,效率有明显提升,主要表现在V oc(开路电压)及FF(填充因子)的提升。其机理在于通过温度和光照强度调节费米能级变化,控制H总量及价态来提高钝化性能。钝化膜层的质量、硅基体掺杂浓度、光注入退火时的工艺温度等对光注入退火工艺提升效率有很大影响。实验证明转换效率越低的电池片经过光注入后效率提升幅度越大;转换效率越高的电池片缺陷会更小,经过光注入退火工艺后几乎无增益。另外同心圆在经过光注入退火工艺后会明显消除。本文主要研究温度、光强、基体电阻率、正表面金属接触面积大小、poly-Si(多晶硅)厚度对光注入退火工艺增效的影响。
After printing and sintering of the N type TOPCon(Tunnel Oxide Passivating Contacts)solar cells,the efficiency was improved significantly by light injection,which mainly manifested in the improvement of V oc and FF.The mechanism is to improve the passivation performance through adjusting the Fermi energy level by temperature and light intensity and controlling the total amount and valence state of H.The quality of the passivation film,the doping concentration of silicon substrate and the temperature during the light injection annealing process have great influence on the efficiency of the light injection annealing process.The experiments show that the lower the conversion efficiency of the battery is,the higher the efficiency is after light injection.The higher the conversion efficiency is,the smaller the defect will be,and the efficiency has almost no gain after the light injection annealing process.In addition,concentric circles can be eliminated obviously after light injection annealing process.This paper mainly studies the effects of temperature,light intensity,substrate resistivity,front surface metal contact area and poly-Si thickness on the efficiency of light injection annealing process.
作者
魏凯峰
刘大伟
倪玉凤
张婷
刘军保
张天杰
杨露
WEI Kaifeng;LIU Dawei;NI Yufeng;ZHANG Ting;LIU Junbao;ZHANG Tianjie;YANG Lu(Spic Solar Power Xi’an Co.Ltd.,Xi’an 710000,China)
出处
《人工晶体学报》
EI
CAS
北大核心
2021年第1期66-72,共7页
Journal of Synthetic Crystals
关键词
光注入
退火
钝化膜
对称结构
多晶硅
温度
同心圆
light injection
annealing
passivation film
symmetrical structure
poly-Si
temperature
concentric circle
