摘要
为了解决纳米光栅加速度计交叉轴干扰的问题,提出了一种原理可行、工艺可行的加速度计结构设计及加工方法。首先,介绍了双光栅加速度计的工作原理及结构组成,通过Ansys结构仿真和COMSOL双光栅仿真,验证了交叉轴干扰对双光栅离面加速度计性能测试不可忽略的影响。其次,提出了一种抗交叉轴干扰、且工艺简单的加速度计结构。仿真结果表明:该结构能有效避免交叉轴干扰,且具有较高的结构灵敏度。最后,基于SOI片对双光栅离面加速度计的加工方案进行完整描述,验证了这种加速度计加工方法的可行性及易操作性,为抗交叉轴干扰的离面加速度计设计和制作提供了思路。
To solve the issue of cross-axis interference of nano-grating accelerometer,a structure design and fabrication method of accelerometer is proposed,which is feasible in principle and technology.Firstly,the working principle and structure of the double-grating accelerometer are described,and verified the influence of cross-axis interference on the performance of the double-grating out-of-plane accelerometer by Ansys and COMSOL simulation.Secondly,an accelerometer structure is presented with simple process.The simulation results show that the structure can avoid cross-axis interference effectively and the structural sensitivity is high.Finally,the SOI-based fabrication scheme of the double-grating out-of-plane accelerometer is described,which verifies the feasibility and operability of the processing method of the accelerometer,it provides a way for the design and fabrication of the out-of-plane accelerometer without cross-axis interference.
作者
宫美梅
王策
金丽
辛晨光
李孟委
GONG Meimei;WANG Ce;JIN Li;XIN Chenguang;LI Mengwei(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第3期20-23,31,共5页
Transducer and Microsystem Technologies
基金
国家自然科学青年科学基金资助项目(62005253)
山西省青年科技研究基金资助项目(201901D211277)
山西省高等学校科技创新项目(2020L0267)。
关键词
加速度计
纳米光栅
交叉轴干扰
结构设计
工艺加工
accelerometer
nano-grating
cross-axis interference
structural design
fabrication process
