摘要
概述了微电子机械系统(MEMS)倾角传感器的工作原理,对MEMS倾角传感器进行分类归纳,主要分为电容式、谐振式、热对流式和光学式等,对上述MEMS倾角传感器的敏感机理、技术特点、关键技术及性能进行详尽的阐述。目前电容式MEMS倾角传感器是用量最大、技术最成熟、可供选型最多的产品;谐振式MEMS倾角传感器基于其准数字式输出和高精度成为研究热点;热对流式和光学式MEMS倾角传感器则是由于其本身测量原理的限制而应用于特定场合。最后从精度、鲁棒性、智能化、国内外技术差距及前沿技术等方面分析了MEMS倾角传感器未来的发展趋势,为国内MEMS倾角传感器的研制和选型提供依据。
The operating principle of micro-electromechanical system(MEMS) inclinometers is summarized, the MEMS inclinometers are classified into capacitive, resonant, thermal convection, optical inclinometers, etc. The sensitive mechanism, technical characteristics, key techno-logy and performances of MEMS inclinometers are described in detail. Currently, the capacitive MEMS inclinometer is the product with the largest usage, the most mature technology and the most options. The resonant MEMS inclinometer based on its quasi-digital output and high precision has become a research hotspot. Thermal convection and optical MEMS inclinometers are applied in specific situations due to the limitation of their measurement principles. Finally, the future trend of MEMS inclinometers is analyzed from the aspects of precision, robustness, intelligence, technology gap between at home and abroad, cutting-edge technology and so on, which provides a basis for the development and option of domestic MEMS inclinometers.
作者
高旗
陈青松
杨贵玉
杨挺
路文一
尹玉刚
Gao Qi;Chen Qingsong;Yang Guiyu;Yang Ting;Lu Wenyi;Yin Yugang(Beijing Research Institute of TelemetryBeijing 100076,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第12期1054-1063,1076,共11页
Micronanoelectronic Technology
基金
装备发展部预研项目。
