摘要
随着大型装备制造技术的不断发展,测量尺度的增加与精度需求的提升给现有大尺寸精密测量技术带来了严峻挑战。光频扫描干涉测距在精度、效率、现场适应性、溯源等方面具有良好的综合性能,尤其适合当前工业测量场景下的大尺寸绝对距离测量任务。本文介绍了光频扫描干涉测距的基本原理,总结了关键技术和仪器的研究进展,从提升测量精度与效率的角度出发,探讨了其应用于工业测量领域仍存在的问题、研究方向和发展前景。
Significance With the continuous development of large equipment manufacturing technology,the increase of measurement scale and the improvement of accuracy requirements make the existing large size precision measurement technology is severely challenged.Length is the most basic and core observation in the field of mechanical geometry measurement.From space-scale measurement and positioning systems,to three dimensional coordinate measurement systems in industrial manufacturing,and even micro-nano scale observation systems,high precision distance measurement plays a fundamental and crucial role.Frequency scanning interferometry distance measurement,with its good comprehensive performance in accuracy,efficiency,field adaptability,traceability and other aspects,is especially suitable for large size absolute distance measurement tasks in the current industrial measurement environment.Progress Since the 1990 s,extensive research on the error factors of frequency scanning interferometry(FSI)ranging has been conducted,resulting in a series of key technologies.When the scanning of optical frequency is linear,the FSI distance measurement accuracy is mainly determined by the phase measurement accuracy of interference signal and the measurement accuracy of optical frequency change.The phase extraction of FSI interference signals is generally achieved through the principle of orthogonal phase discrimination,which can achieve high accuracy,but requires high signal-to-noise ratio of interference signals.The spectrum analysis method can extract the frequency characteristics of the target under the condition of low signalto-noise ratio.Since the femtosecond optical frequency comb is a series of frequency combs with equal optical frequency interval in the frequency domain and the optical frequency corresponding to each comb can be directly traced to the international standard,the scanning optical frequency range can be monitored by using the frequency characteristics of the optical frequency comb with high accuracy(Fig.2).More inte
作者
吴腾飞
周强
林嘉睿
杨凌辉
邾继贵
Wu Tengfei;Zhou Qiang;Lin Jiarui;Yang Linghui;Zhu Jigui(State Key Laboratory of Precision Measurement Technology and Instruments,Tianjin University,Tianjin 300072,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2021年第19期213-226,共14页
Chinese Journal of Lasers
基金
国家自然科学基金(51835007,51721003,51975408)。
关键词
测量
绝对测距
光频扫描干涉
大空间坐标测量
工业测量
measurement
absolute distance measurement
frequency scanning interferometry
large space coordinate measurement
industrial measurement
