摘要
传统硅基压力传感器普遍具有灵敏度低、温漂和时漂明显等半导体器件固有属性.本文提出的硅铝异质结构MEMS压力传感器及其恒温控制和自校正方法可一定程度上解决该问题.采用SOI硅片制造了具有压阻放大效应的新型硅铝异质结构压力传感器芯片,利用有限元仿真验证了其有效性.随后为其设计了恒温控制封装结构和自适应优化目标值PID加热控制策略,采用热稳态分析验证了该恒温控制封装的合理性.传感器采用AD5420可调电流源来模拟传感器的标定压力,在传感器发生一定时漂特性后更新传感器的输出特性,完成自校正操作.实验表明单个应力敏感硅铝异质结构在恒温系统控制下达到0.283 mV/V/kPa的灵敏度,结合温度参考结构的差分输出,传感器的热零点漂移系数从-6.92×10-1%FS/℃减小至-1.51×10^(-3)%FS/℃,且可达到±5.5 kPa的预测误差,同时自校正操作将传感器最大预测误差从-6.1 kPa减小至5.0 kPa.本文提出的硅铝异质结构压力传感器的温度补偿与时漂补偿方案对优化压阻式压力传感器的综合性能有着一定的借鉴意义.
Traditional diffused silicon pressure sensors generally have inherent properties of semiconductor devices such as low sensitivity,temperature drift and time drift.The proposed MEMS pressure sensor utilizing aluminum-silicon hybrid structures with function of thermodynamic control and self-calibration can solve those problems to a certain extent.This kind of pressure sensor with amplified piezoresistive effect is fabricated by using SOI wafers,which is verified by combining with finite element simulation.Subsequently,a set of thermodynamic control package and its PID algorithm of heating control strategy with self-adaptive optimized target temperature are designed for it.Thermal steady-state analysis is applied to verify the feasibility of the thermodynamic control system.AD5420 is used to simulate the calibration pressure of the sensor,and the output characteristic of the sensor is updated when a certain time drift characteristic of the sensor occurs,and the operation of self-calibration is completed.Experiments show that a single stress-sensitive aluminum-silicon hybrid structure can reach a sensitivity of 0.283mV/V/kPa under the control of thermodynamic control system.Combined with the differential output of the temperature-dependent structure,the thermal coefficient of zero drift can be reduced to-1.51×10^(-3)%FS/℃,whose prediction error is±5.5 kPa.The self-calibration operation reduces the maximum prediction error of the sensor from-6.1 kPa to 5.0 kPa.The temperature and time-drift compensation of MEMS pressure sensor utilizing aluminum-silicon hybrid structures have certain significance for optimizing the comprehensive performance of piezoresistive pressure sensors.
作者
谢晓璐
张加宏
邢俊
王超
冒晓莉
XIE Xiaolu;ZHANG Jiahong;XING Jun;WANG Chao;MAO Xiaoli(School of Electronic and Information Engineering,Nanjing University of Information Science and Technology,Nanjing Jiangsu 210044,China;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology,Nanjing University of Information Science and Technology,Nanjing Jiangsu 210044,China;Jiangsu Key Laboratory of Meteorological Observation and Signal Processing,Nanjing University of Information Science and Technology,Nanjing Jiangsu 210044,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2021年第6期733-741,共9页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(41605120)
江苏高校优势学科Ⅲ期建设工程项目(PAPD)。
关键词
硅铝异质结构
压阻放大效应
温度补偿
恒温控制系统
时间漂移
自校正
aluminum-silicon hybrid structure
amplified piezoresistive effect
temperature compensation
thermodynamic control system
time drift
self-calibration
