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基于多位置的MEMS加速度计快速自标定 被引量:1

Fast Self-Calibration Method for MEMS Accelerometer Based on Multi-Position
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摘要 针对MEMS加速度计输出信息受自身误差项(如零偏、标度因数、非正交误差等)干扰而影响器件自身测量精度的问题,提出一种不依赖转台设备的快速24位置标定方法。在分析MEMS加速度计输出特性基础上建立MEMS加速度计输出误差模型,设计并展开连续转停标定,利用重力特征实现加速度计误差修正。基于器件零偏、标度因数、非正交误差9个误差参数建立MEMS加速度计标定模型后,提出基于牛顿法对误差参数最优值进行估计。加速度计标定补偿实验结果表明,多位置标定方法能有效补偿自身误差并提高输出加速度信息的精度。 According to the problem that the output information of the MEMS accelerometer is interfered by its own error items(such as zero bias,scale factor,non-orthogonal error,etc.),which affects the measurement accuracy of the device,a fast 24-position calibration method without turntable equipment is proposed.Based on the analysis of the output characteristics of MEMS accelerometer,the output error model of MEMS accelerometer was established.The hexahedron clamp was used to carry out the continuous turn-stop calibration and the gravity characteristic was used to correct the error of the accelerometer.The calibration model of MEMS accelerometer was established based on nine error parameters of device bias,scale factor and non-orthogonal error,and the optimal error parameters were estimated based on Newton method.The experimental results of accelerometer calibration compensation showes that the multi-position calibration method can effectively compensate its own errors and improve the accuracy of output acceleration information.
作者 王学瀚 WANG Xue-han(Department of Electrical and Electric Engineering,Wenzhou Vocational&Technical College,Wenzhou 325000,China)
出处 《测控技术》 2021年第6期61-64,共4页 Measurement & Control Technology
关键词 MEMS加速度计 误差补偿 多位置 分立式 MEMS accelerometer error compensation multi-position discrete
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