摘要
光学自由曲面因其表面自由度较多而难于进行检测。干涉检测法具有高精度非接触的特点,但传统干涉仪中的静态补偿器在自由曲面加工过程中未知面形不断变化的情况下,难以实现原位检测。因此,可编程控制的大动态范围自适应补偿器成为近年来自由曲面干涉检测中的研究热点。结合课题组在自由曲面自适应干涉检测领域的工作,介绍了光学自由曲面自适应干涉检测的最新研究进展,详细分析了基于可变形镜和空间光调制器的自适应干涉检测技术,介绍了针对干涉图目标的自适应控制算法,总结了两大类自适应检测方法的优点以及发展瓶颈,并对未来自由曲面的自适应检测技术进行了展望。
Optical free-form surfaces are difficult to detect due to their rich degrees of freedom.Interference detection methods are both highly precise and non-contact.However,the static compensator in a traditional interferometer faces difficulty in achieving in-situ tests of unknown surface shapes or those changing during fabrication.Therefore,programmable adaptive compensators for large dynamic ranges have become a wellresearched topic in recent years.Combined with the research work in the field of freeform surface metrology,we introduce the latest research progress in adaptive interferometry for optical freeform surfaces.Adaptive interferometers based on a Deformable Mirror(DM)or Liquid Crystal Spatial Light Modulator(LC-SLM)are analyzed in detail.An adaptive controlling algorithm in the adaptive interferometer is introduced as well.Finally,the advantages and development bottleneck of the above two kinds of adaptive interferometry are summarized and the prospects for the future development of freeform surface adaptive interferometers are proposed.
作者
张磊
吴金灵
刘仁虎
俞本立
ZHANG Lei;WU Jin-ling;LIU Ren-hu;YU Ben-li(Key Laboratory of Opto-electronic Information Acquisition and Manipulation,Ministry of Education,Anhui University,Hefei 230601,China)
出处
《中国光学》
EI
CAS
CSCD
北大核心
2021年第2期227-244,共18页
Chinese Optics
基金
国家自然科学基金(No.61705002,No.61675005,No.61905001,No.41875158)
安徽省自然科学基金(No.1808085QF198,No.1908085QF276)
安徽大学科研启动项目(No.J01003208)
国家重点研发计划(No.2016YFC0301900,No.2016YFC0302202)。
