摘要
基于永磁直线电机(PMLM)的龙门式运动平台广泛应用于芯片封装领域,但由于两PMLM间存在横梁机械耦合,因此较难实现系统的快速响应和精准同步。以龙门运动平台为研究对象,设计三环闭合控制回路后,提出一种基于模糊前馈的控制策略,同时辅以交叉耦合同步控制器,实现系统的快速同步性能。对传统PID同步控制和基于模糊前馈的同步控制算法进行对比分析,仿真结果表明:模糊前馈控制阶跃响应的上升时间为48.5 ms,比传统PID控制缩短了65%;交叉耦合同步算法在保证定位精度的同时,使得系统具有良好的同步跟随性能和较强的抗干扰能力,基本满足芯片封装高速高精度的要求。
The gantry type motion platform based on permanent magnet linear motor(PMLM)is widely used in the field of chip packaging.Due to the mechanical coupling of the beam between the two axes,it is difficult to achieve fast response and precise synchronization of the system.Taking the gantry motion platform as the research object,based on the three-loop servo control system including current loop,speed loop and position loop,a fuzzy feedforward-based control strategy was proposed,and the cross-coupling synchronization algorithm was adopted to achieve fast synchronous performance of the system.The traditional PID synchronization control and fuzzy feedforward-based synchronization control algorithm were compared and analyzed.The simulation results show that the rise time of step response under the fuzzy feedforward control is 48.5 ms,which is 65%shorter than the traditional PID control;the cross-coupling synchronization algorithm ensures positioning precision,so the system has good synchronous following performance and strong anti-interference ability,which basically meets the requirements of high-speed and high-precision chip packaging.
作者
贺云波
李展超
HE Yunbo;LI Zhanchao(Key Laboratory of Precision Microelectronic Manufacturing Technology&Equipment of Ministry of Education,School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou Guangdong 511911,China)
出处
《机床与液压》
北大核心
2020年第22期120-124,共5页
Machine Tool & Hydraulics
基金
广东省自然科学基金资助项目(2016A030308016)
广东省R&D重点项目(2015B010133005)。
关键词
龙门运动平台
永磁直线电机
模糊控制
前馈控制
交叉耦合
Gantry type motion platform
Permanent magnet linear motor
Fuzzy control
Feedforward control
Cross coupling
