摘要
声学扫描显微镜检查是塑封器件可靠性分析中一项重要的试验项目,然而声扫设备在自动识别缺陷上存在局限性会导致分层假象产生。指出了所用声扫设备的图像着色原理存在的问题以及几类常见分层假象的特征,分析了不同分层假象的检测波形形成的物理原理,在此基础上提出了检测波形与器件结构相结合的分析方法。实践证明该方法可以对声扫图像中异常区域进行正确分析,并对分层假象进行准确识别。
SAM is an important test item in the reliability analysis of PEM.However,the limitations of acoustic scanning equipment in the automatic identification of defects will lead to the generation of delamination-illusion.This paper points out the problems of the image coloring principle of the acoustic scanning equipment used and the characteristics of several common delamination-illusion,analyzes the physical principle of the waveform formation of different delamination-illusion,and based on this,puts forward an analysis method combining the waveform detection with device structure.The practice shows that this method can correctly analyze the abnormal areas in the acoustic image and accurately identify the delamination-illusion.
作者
田健
邓昊
王伯淳
陆洋
TIAN Jian;DENG Hao;WANG Bochun;LU Yang(The Metrology and Measurement Institute of Hubei Space Academy,Xiaogan 432000,China)
出处
《电子与封装》
2020年第11期60-63,共4页
Electronics & Packaging
