摘要
目的研究铁电效应对钽酸锂加工的潜在影响。方法选用3000#的金刚石粉料制作的金刚石丸片,将其固结在设计的夹具中制成一种新型固结磨盘,并与游离磨料研磨加工结果进行比较,然后采用恒温水浴装置将冷却液温度控制在低温状态,并添加电解质溶液,以材料去除率、表面形貌及粗糙度作为指标,进一步分析铁电效应对固结磨盘加工钽酸锂的结果影响。结果游离磨料加工10 min后,钽酸锂晶片表面粗糙度Sa从初始的419.112 nm降至232.319 nm,材料去除率MRR为36.78μm/h,晶片表层存在磨粒嵌入、大量凹坑及深划痕等缺陷,且研磨过程中易破损。同样的加工条件下,固结磨盘研磨钽酸锂晶片的表面粗糙度Sa从419.112 nm降到97.004 nm,材料去除率MRR为57.19μm/h,相对于游离磨料加工结果,晶片表面磨粒嵌入情况极少,划痕深度变浅、凹坑数量减小,表面更光滑。在冷却液温度为5℃并添加0.5%(体积分数)的电解质溶液时,使用固结磨盘研磨10 min后,表面粗糙度Sa进一步下降到37.943 nm,材料去除率为58.75μm/h。材料表面无磨粒嵌入,无较深沟槽和凹坑,仅存在少许浅划痕。结论相同加工条件下,固结磨料比传统游离磨料研磨后的表面粗糙度值更低,表面质量更好,去除率更高,加工效率和成品率更优。低温状态和加入电解质溶液能够有效抑制钽酸锂的内应力,防止裂纹产生及扩展,改善晶片的表面损伤,进一步提高了晶片表面质量。
The work aims to study the potential influence of ferroelectric effect on machining of lithium tantalate.The pellets made of 3000#diamond powder were selected and consolidated in the designed fixture to make a new type of fixed abrasive pad.The lapping results of free abrasive and fixed abrasive pad on lithium tantalate were compared and discussed.Then,the constant temperature water bath device was used to control the coolant at a low temperature in the experiment,and elec trolyte solution was added to further analyze the influence of ferroelectric effect on the results of the processing of lithium tantalate by the fixed abrasive pad with material removal rate,surface morphology,and roughness as indicators.After lapping for 10 minutes,the surface roughness of LT wafer reduced from 419.112 nm to 232.319 nm,and the material removal rate was 36.78μm/h.Abrasive embedding,deep scratches,and a large number of pits appeared on the surface of workpiece,and the LT wafer broke easily during grinding.Under the same processing conditions,the surface roughness of the fixed abrasive pad reduced from 419.112 nm to 97.004 nm,and the material removal rate was 57.19μm/h.Compared with lapping results of free abrasive pad,the abrasive embedding was extremely less,the depth of scratches became shallow,the number of pits decreased,and the surface was smoother.When the coolant temperature was 5℃and electrolyte solution with a concentration of 0.5%was added,the surface roughness Sa reduced to 37.943 nm after lapping with a fixed abrasive pad for 10 minutes,and the average material removal rate was 58.75μm/h.There were only some slight scratches on the surface of workpiece,without embedded abrasive particles and deep pits.Under the same conditions,the surface after ground with fixed abrasive pad has lower rough ness,better quality,higher removal rate and more excellent machining efficiency and yield than that ground with free abrasive pad.Low temperature and electrolyte solution can effectively inhibit the physical properties of lit
作者
刘敏
凌洋
袁巨龙
杭伟
LIU Min;LING Yang;YUAN Ju-long;HANG Wei(Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of the Ministry of Education,Zhejiang University of Technology,Hangzhou 310014,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2020年第10期316-323,337,共9页
Surface Technology
基金
国家自然科学基金(51605440,51575492)
中国博士后科学基金(2017M621966)
浙江省公益技术研究项目(LGG19E050021)。
关键词
钽酸锂
固结磨料
铁电效应
表面粗糙度
去除率
lithium tantalite
fixed abrasive
ferroelectric effect
surface roughness
material removal rate
