摘要
作为相干衍射成像技术的一种,相干调制成像(coherent modulation imaging,CMI)是一种无透镜相位成像技术,不同于多光斑相位恢复技术,通过引入已知的强波前调制,CMI可以实现单次曝光下对入射波前的快速重建,同时结构简单不需要参考光.除了能够用于相位成像、解决脉冲光束的在线测量问题外,本文将其用于精密光学元件(峰谷值(peak value,PV)≤0.5l,l=632.8 nm)的面型检测.为验证其测量能力,对10片口径80 mm、PV值介于0.1l和0.5l之间的石英窗口进行了重复测量,相比于商业干涉仪的测量结果,CMI算法测量结果的峰谷比值的标准偏差是0.0305l(l=632.8 nm),均方根(root-mean-square,RMS)的标准偏差为0.0052l,对于PV和RMS的测量精度可达到0.1l和0.01l,为研究其极限性能,同时对PV=l/20的平行平晶进行了对比测量,分析了其噪声来源,考虑到CMI测量算法仍有很大的改进空间,其有望成为一种区别于干涉测量的新型高精度光学元件检测技术.
As one of the coherent diffractive imaging(CDI)techniques,coherent modulation imaging(CMI)is a lensless phase imaging technology with diffraction limited resolution in theory.Unlike multiple measurement phase retrieval algorithms,the CMI can achieve fast convergence speed with single-shot measurement by introducing a pre-characterized random phase modulator.Besides,it has simple structure without reference wave based on iterative engine.Despite the fact that the matured phase imaging can be used to implement the on-line wave diagnostics of laser pulse,in this work we accurately measure the face-type of optical component with peak-to-valley value below 0.5 l(l=632.8 nm)by using the CMI for the first time.In order to verify its measurement capability,10 quartz windows with a diameter of 80 mm and PV value between 0.1 l and 0.5 l are repeatedly measured.Compared with the results of commercial interferometer,the root mean square error(Root MSE)of the peak-to-valley(PV)ratio of the results of the CMI is 0.0305 l,and the Root MSE of the root mean square(RMS)is 0.00522 l.The measurement accuracy of PV ratio and RMS can reach 0.1 l and 0.01 l respectively.In addition,the parallel flat with PV ratio=l/20 is measured and analyzed with CMI,and its noise level is also analyzed.Considering that the potential improvement of CMI is available in the future,the CMI is expected to become a new technique for optical metrology with high precision,which is different from interferometry.
作者
葛银娟
潘兴臣
刘诚
朱健强
Ge Yin-Juan;Pan Xing-Chen;Liu Cheng;Zhu Jian-Qiang(Key Laboratory of High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;National Laboratory on High Power Laser and Physics,Chinese Academy of Sciences and China Academy of Engineering Physics,Shanghai 201800,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China)
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2020年第17期87-94,共8页
Acta Physica Sinica
基金
国家自然科学基金(批准号:61827816,11875308,61675215)
中国科学院科研仪器设备研制项目(批准号:YJKYYQ20180024)
上海市“科技创新行动计划”(批准号:19142202600)资助的课题.
关键词
相位恢复
迭代引擎
光学计量
相干衍射成像
phase retrieval
iterative engine
optical metrology
coherent diffractive imaging
