摘要
随着水下消声技术的发展,水下目标探测难度越来越大,单个水听器难以实现有效探测,需组成水听器阵列,而现有微电子机械系统(MEMS)矢量水听器存在粘接纤毛一致性相对较差、阵列应用相对困难等问题。设计了一种微纳跨尺度一体化MEMS矢量水听器。根据理论与有限元仿真分析,确定了在满足水下探测频率20~1 000 Hz使用条件下的MEMS矢量水听器的基本尺寸,并对该水听器进行了微纳跨尺度一体化加工流程设计,通过一体化加工工艺方式,加工出硅纳米线作为敏感压阻单元,使该水听器压阻达到约1.2×104Ω,相比现有水听器压阻的阻值有了明显的提高,并对硅纳米线压阻进行了压阻系数测试,结果表明一体化工艺加工出的硅纳米线比传统体硅压阻系数提高了3~4倍。同时该工艺将硅纤毛与二氧化硅梁集成在一起,减少了粘接过程存在的对准精度与一致性差的问题,为MEMS矢量水听器发展提供了一个新的研究方向。
With the development of underwater noise reduction technology,the detection of underwater targets is becoming more and more difficult.It is difficult to achieve effective detection with a single hydrophone,and it is necessary to form the hydrophone array.The existing microelectromechanical system(MEMS)vector hydrophones have problems such as relatively poor consistency of bonding cilia and relatively difficult array applications.A micro-nano cross-scale integrated MEMS vector hydrophone was designed.Based on the theoretical and finite element simulation analyses,the basic size of the MEMS vector hydrophone was determined under the condition of satisfying the underwater detection frequency of 20-1 000 Hz.The micro-nano cross-scale integrated processing flow of the hydrophone was designed.Silicon nanowires fabricated by integrated processing technology were used as sensitive piezoresistive units.Then compared with the existing hydrophone,the piezoresistance of the hydrophone is obviously improved and reaches about 1.2×104Ω.The piezoresistive coefficient of silicon nanowires was measured.The results show that the piezoresistive coefficient of the fabricated silicon nanowires is about 3-4 times higher than that of the traditional bulk silicon.Meanwhile,the process integrates silicon cilia and silicon oxide beams,and reduces the problems of poor alignment accuracy and consistency in the bonding process,providing a new research direction for the development of MEMS vector hydrophones.
作者
史一明
齐秉楠
宋金龙
王任鑫
张国军
Shi Yiming;Qi Bingnan;Song Jinlong;Wang Renxin;Zhang Guojun(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China)
出处
《微纳电子技术》
北大核心
2020年第6期468-475,共8页
Micronanoelectronic Technology
基金
国家自然科学基金青年科学基金资助项目(61604134)
国防科技重点实验室基金资助项目(6142109KF201804)
博士后特别资助计划(2017T100171)
实验室开放基金资助项目(JZ20180306 WR)
中北大学青年学术带头人计划资助项目。
关键词
一体化
矢量水听器
微电子机械系统(MEMS)
有限元仿真分析
微纳跨尺度
压阻
硅纳米线
integration
vector hydrophone
micro-electromechanical system(MEMS)
finite element simulation analysis
micro-nano cross-scale
piezoresistance
silicon nanowire
