摘要
为了解决MEMS微结构非接触式激励的问题,提出了一种基于聚焦激波的非接触式激励方法。该方法的基本原理是利用高压电容空气放电来产生激波,再通过半椭球腔体对激波进行聚焦,从而实现对微结构的非接触式激励。基于该方法搭建了微结构动态特性测试系统,并对矩形等截面和T型单晶硅微悬臂梁的动态特性进行了测试实验,获得了两种微悬臂梁的一阶有阻尼固有频率和阻尼比。实验结果表明:矩形等截面和T型单晶硅微悬臂梁一阶无阻尼固有频率分别为5 912 Hz和2 150 Hz。通过动态测试实验验证了基于聚焦激波非接触式激励方法在MEMS微结构激励上的有效性。
To solve the problem of non-contact excitation of MEMS microstructures,a non-contact excitation method based on focused shock waves using is proposed.The fundamental principle of this method is using high-voltage capacitive air discharge to generate shock waves,then focus these shock waves through a hemispherical chamber so as to achieve non-contact excitation of the microstructures.A testing system for dynamic characteristics of microstructures is built up based on this approach.Experiments are performed on the dynamic characteristics of rectangular equal-section and T-shaped single-crystal silicon microcantilevers.The first-order damped natural frequencies and damping ratios of the two microcantilevers are obtained.The experimental results show that the first-order undamped natural frequency of the rectangular equal-section and single-crystal silicon microcantilever are 5912 Hz and 2150 Hz,respectively.Effectiveness of this method based on focused shock wave non-contact excitation in MEMS microstructures exciting is verified by dynamic testing experiments.
作者
佘东生
于震
田江平
SHE Dongsheng;YU Zhen;TIAN Jiangping(College of Control Science and Engineering,Bohai University,Jinzhou 121013,China;School of Energy and Power Engineering,Dalian University of Technology,Dalian 116024,China)
出处
《传感器与微系统》
CSCD
北大核心
2024年第4期41-44,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金面上项目(52071064)
辽宁省教育厅重点项目(LJKZ1009)。
关键词
聚焦激波
MEMS微结构
非接触式激励
动态特性测试
focused shock wave
MEMS microstructures
non-contact excitation
dynamic characteristic testing
